Surface micromachined electrothermal V-beam micromotors

American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)

Volumn 3, Issue , 2001, Pages 141-147

  Schreiber, David S ^a   Cheng, Wei Jen ^a   Maloney, John M ^a   DeVoe, Don L ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROTHERMAL MICROACTUATORS;

ELECTRIC MOTORS; ELECTRIC RESISTANCE; HIGH TEMPERATURE EFFECTS; MICROACTUATORS; MICROMACHINING; RELIABILITY;

MICROELECTROMECHANICAL DEVICES;

EID: 1542537637     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

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