![]() |
Volumn 3436, Issue 2, 1998, Pages 555-565
|
Semiconducting YBaCuO as infrared detecting bolometers
a
|
Author keywords
[No Author keywords available]
|
Indexed keywords
BOLOMETERS;
CMOS INTEGRATED CIRCUITS;
ETCHING;
HEAT RESISTANCE;
MAGNESIA;
MICROMACHINING;
PYROELECTRICITY;
SILICA;
SILICON NITRIDE;
SPUTTER DEPOSITION;
THERMAL CONDUCTIVITY OF SOLIDS;
YTTRIUM BARIUM COPPER OXIDES;
INFRARED DETECTING BOLOMETERS;
UNCOOLED INFRARED DETECTION;
INFRARED DETECTORS;
|
EID: 0032299112
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.328054 Document Type: Conference Paper |
Times cited : (19)
|
References (23)
|