YBaCuO uncooled microbolometer IRFPA

Proceedings of SPIE-The International Society for Optical Engineering

Volumn 4369, Issue , 2001, Pages 297-304

  Wada, Hideo ^a   Sone, Takanori ^b   Hata, Hisatoshi ^b   Nakaki, Yoshiyuki ^b   Kaneda, Osamu ^b   Ohta, Yasuaki ^b   Ueno, Masashi ^b   Kimata, Masafumi ^b  

^a JAPAN DEFENSE AGENCY   (Japan)

^b MITSUBISHI ELECTRIC CORPORATION   (Japan)

Author keywords

Infrared absorption; Microbolometer; Thermal imaging; Uncooled infrared focal plane; YBaCuO film

Indexed keywords

ELECTRIC CONDUCTIVITY OF SOLIDS; INFRARED DETECTORS; MAGNETRON SPUTTERING; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING FILMS; SEMICONDUCTOR DEVICE MANUFACTURE; THERMAL CONDUCTIVITY OF SOLIDS; VANADIUM COMPOUNDS; YTTRIUM BARIUM COPPER OXIDES;

FILL FACTOR; INFRARED ABSORPTANCE; MICROBOLOMETER; NOISE EQUIVALENT TEMPERATURE DIFFERENCE; TEMPERATURE COEFFICIENT OF RESISTANCE;

BOLOMETERS;

EID: 0035760987     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.445342     Document Type: Article

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