Optimization of design and technology for uncooled poly-SiGe microbolometer arrays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4721, Issue , 2002, Pages 122-133

  Leonov, Vladimir N ^a   Perova, Natalia A ^a   Vermeiren, Jan ^a   Grietens, Bob ^a   Goessens, Claus ^a   De Moor, Piet ^b   Van Hoof, Chris ^b  

^a XenICs   (Belgium)

^b IMEC   (Belgium)

Author keywords

Detector; Focal plane array; Infrared; Microbolometer; SiGe; Uncooled

Indexed keywords

BOLOMETERS; COMPUTER SIMULATION; MICROELECTROMECHANICAL DEVICES; OPTIMIZATION; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON COMPOUNDS;

FOCAL PLANE ARRAYS; MICROBOLOMETER ARRAYS; SILICON GERMANIDE;

INFRARED DETECTORS;

EID: 0036912103     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.478840     Document Type: Conference Paper

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