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Sensors and Actuators, A: Physical

Volumn 66, Issue 1-3, 1998, Pages 193-199

IR bolometers made of polycrystalline silicon germanium

(5) Sedky, Sherif a Fiorini, Paolo a,b Caymax, Matty a Verbist, Agnes a Baert, Chris a

a IMEC (Belgium)

b ROMA TRE UNIVERSITY (Italy)

Author keywords

Bolometers; IR detection; Polycrystalline silicon germanium

Indexed keywords

ANNEALING; DEPOSITION; ELECTRIC VARIABLES MEASUREMENT; INFRARED DETECTORS; MECHANICAL VARIABLES MEASUREMENT; MICROMACHINING; POLYCRYSTALLINE MATERIALS; SILICON ALLOYS; THERMAL CONDUCTIVITY OF SOLIDS; THERMAL EFFECTS;

MICROBOLOMETERS;

BOLOMETERS;

EID: 0032048867 PISSN: 09244247 EISSN: None Source Type: Journal
DOI: 10.1016/S0924-4247(98)00007-7 Document Type: Article

Times cited : (98)

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