Precompensated excitation waveforms to suppress harmonic generation in MEMS electrostatic transducers

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 51, Issue 11, 2004, Pages 1564-1574

  Zhou, Shiwei ^a   Reynolds, Paul ^a   Hossack, John ^a  

^a University of Virginia   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC FORCE; ELECTROSTATIC TRANSDUCERS; FINITE ELEMENT ANALYSIS (FEA); HARMONIC IMAGING;

COMPUTER SIMULATION; ELECTROSTATIC DEVICES; FINITE ELEMENT METHOD; HARMONIC GENERATION; IMAGING TECHNIQUES; INTEGRATED CIRCUITS; TRANSDUCERS; WAVEFORM ANALYSIS;

MICROELECTROMECHANICAL DEVICES;

EID: 10444250226     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2004.1367498     Document Type: Article

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