Volumetric imaging using 2D capacitive micromachined ultrasonic transducer arrays (CMUTs): Initial results

Proceedings of the IEEE Ultrasonics Symposium

Volumn 2, Issue , 2002, Pages 1083-1086

  Oralkan, Ömer ^a,b   Ergun, A Sanli ^a   Cheng, Ching Hsiang ^a   Johnson, Jeremy A ^a,c   Karaman, Mustafa ^d   Lee, Thomas H ^b   Khuri Yakub, Butrus T ^a  

^a STANFORD UNIVERSITY   (United States)

^b Stanford University   (United States)

^c STANFORD UNIVERSITY   (United States)

^d ISIK UNIVERSITY   (Turkey)

Author keywords

[No Author keywords available]

Indexed keywords

DATA ACQUISITION; FLIP CHIP DEVICES; MEDICAL IMAGING; PHOTOLITHOGRAPHY; POLYSILICON; SILICON WAFERS; ULTRASONIC IMAGING;

CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER; VOLUMETRIC IMAGING;

ULTRASONIC TRANSDUCERS;

EID: 0036992266     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. B. T. Khuri-Yakub, C.-H. Cheng, F. L. Degertekin, S. Ergun, S. Hansen, X. C. Jin, and Ö. Oralkan, "Silicon micromachined ultrasonic transducers," Jpn. J. Appl. Phys., vol. 39, pp. 2883-2887, May 2000.
2. C. H. Cheng, A. S. Ergun, and B. T. Khuri-Yakub, "Electrical through wafer interconnects with 0.05 picofarads parasitic capacitance on 400-μm thick silicon substrate," in Proc. Solid-State Sensor, Actuator and Microsystems Workshop, 2002, pp. 157-160.
3. X. C. Jin, Ö. Oralkan, F. L. Degertekin and B. T. Khuri-Yakub, "Characterization of one-dimensional capacitive micromachined ultrasonic immerson transducer arrays," IEEE Trans. on Ultrason. Ferroelect. Freq. Contr., vol. 48, pp. 750-759, May 2001.
4. Ö. Oralkan, X. C. Jin, F. L. Degertekin and B. T. Khuri-Yakub, "Simulation and experimental characterization of a 2-D capacitive micromachined ultrasonic transducer array element," IEEE Trans. Ultrason. Ferroelect. Freq. Contr., vol. 46, pp. 1337-1340, Nov. 1999.
5. O. Oralkan, A. S. Ergun, J. A. Johnson, M. Karaman, U. Demirci, K. Kaviani, T. H. Lee, and B. T. Khuri-Yakub, "Capacitive micromachined ultrasonic transducers: Next generation arrays for acoustic imaging?," IEEE Trans. Ultrason. Ferroelect. Freq. Contr., in press