Field characterization of an air-coupled micromachined ultrasonic capacitance transducer

Journal of the Acoustical Society of America

Volumn 101, Issue 1, 1997, Pages 315-322

  Bashford, A G ^a   Schindel, David W ^b,c   Hutchins, David A ^a   Wright, W M D ^a  

^a UNIVERSITY OF WARWICK   (United Kingdom)

^b QUEEN S UNIVERSITY   (Canada)

^c NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

AIR; ATTENUATION; CAPACITANCE; FOURIER TRANSFORMS; MATHEMATICAL MODELS; PRESSURE; SILICON; ULTRASONIC WAVES;

ACOUSTIC PRESSURE FIELD; ANNULUS; SILICON BACKPLATE; TONE BURSTS; ULTRASONIC CAPACITANCE TRANSDUCERS; ZONE PLATE;

ULTRASONIC TRANSDUCERS;

ARTICLE; MATHEMATICAL ANALYSIS; PIEZOELECTRICITY; PRIORITY JOURNAL; SIGNAL TRANSDUCTION; SOUND PRESSURE; SOUND TRANSMISSION; ULTRASOUND TRANSDUCER;

EID: 0031012370     PISSN: 00014966     EISSN: None     Source Type: Journal    
DOI: 10.1121/1.418011     Document Type: Article

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