Chemical imaging of photoresists with coherent anti-Stokes Raman scattering (CARS) microscopy

Journal of Physical Chemistry B

Volumn 108, Issue 4, 2004, Pages 1296-1301

  Potma, Eric O ^a   Xie, X Sunney ^a   Muntean, Ligia ^a   Preusser, Jan ^b,d   Jones, David ^b   Ye, Jun ^b   Leone, Stephen R ^b,e   Hinsberg, William D ^c   Schade, Wolfgang ^d  

^a HARVARD UNIVERSITY   (United States)

^b UNIVERSITY OF COLORADO   (United States)

^c IBM   (United States)

^d CLAUSTHAL UNIVERSITY OF TECHNOLOGY   (Germany)

^e LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

IMAGING TECHNIQUES; INTERFEROMETRY; LITHOGRAPHY; MOLECULAR VIBRATIONS; OPTICAL MICROSCOPY; POLYSTYRENES; RAMAN SCATTERING;

ANTI STOKES RAMAN SCATTERING; CARBONYL STRETCHING VIBRATION; CHEMICAL IMAGING; INTERFEROMETRIC LITHOGRAPHY; SCANNING OPTICAL MICROSCOPY;

PHOTORESISTS;

EID: 0442311058     PISSN: 15206106     EISSN: None     Source Type: Journal    
DOI: 10.1021/jp030903p     Document Type: Article

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