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Materials Science in Semiconductor Processing

Volumn 1, Issue 3-4, 1998, Pages 267-270

Ultra high temperature rapid thermal annealing of GaN

(10) Cao, X A a Singh, R K a Pearton, S J a Fu, M b Sekhar, J A b Wilson, R G c Zolper, J C e Han, J d Rieger, D J d Shul, R J d

a UNIVERSITY OF FLORIDA (United States)

b Micropyretics Heaters Intl Inc (United States)

c OFFICE OF NAVAL RESEARCH (United States)

d SANDIA NATIONAL LABORATORIES (United States)

e NONE

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0347569920 PISSN: 13698001 EISSN: None Source Type: Journal
DOI: 10.1016/S1369-8001(98)00037-7 Document Type: Article

Times cited : (2)

References (22)

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