SCOPUS 정보 검색 플랫폼

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 127-128, Issue , 1997, Pages 463-466

Ion implantation of epitaxial GaN films: Damage, doping and activation

(8) Parikh, Nalin a Suvkhanov, Agajan a Lioubtchenko, Mike a Carlson, Eric b Bremser, Michael b Bray, David b Davis, Robert b Hunn, John c

a University of North Carolina at Chapel Hill (United States)

b North Carolina State University (United States)

c OAK RIDGE NATIONAL LABORATORY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CHEMICAL VAPOR DEPOSITION; DISLOCATIONS (CRYSTALS); EPITAXIAL GROWTH; GRAIN BOUNDARIES; ION IMPLANTATION; PHOTOLUMINESCENCE; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTOR DOPING; SILICON WAFERS; TRANSMISSION ELECTRON MICROSCOPY;

CHANNELING; GALLIUM NITRIDE;

SEMICONDUCTING FILMS;

EID: 0031547830 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(97)00076-1 Document Type: Article

Times cited : (42)

References (10)

1
- 11544311593
- M.A. Haase, J. Qui, J.M. DePuydt and H. Cheng, Appl. Phys. Lett. 59 (1991) 1272.
- (1991) Appl. Phys. Lett. , vol.59 , pp. 1272
- Haase, M.A.¹ Qui, J.² DePuydt, J.M.³ Cheng, H.⁴

2
- 21544434141
- H. Jeon, J. Ding, A.V. Nurmikko, W. Xie, D.C. Grillo, M. Kobayashi, R.L. Gunshor, G.G. Hua and N. Otsuka, Appl. Phys. Lett. 60 (1992) 2045.
- (1992) Appl. Phys. Lett. , vol.60 , pp. 2045
- Jeon, H.¹ Ding, J.² Nurmikko, A.V.³ Xie, W.⁴ Grillo, D.C.⁵ Kobayashi, M.⁶ Gunshor, R.L.⁷ Hua, G.G.⁸ Otsuka, N.⁹

3
- 36449000654
- W. Xie, D.C. Grillo, R.L. Gunshor, M. Kobayashi, M. Jeon, J, Ding, A.V. Nurmikk, G.C. Hua and N. Otsuka, Appl. Phys. Lett. 60 (1992) 1999.
- (1992) Appl. Phys. Lett. , vol.60 , pp. 1999
- Xie, W.¹ Grillo, D.C.² Gunshor, R.L.³ Kobayashi, M.⁴ Jeon, M.⁵ Ding, J.⁶ Nurmikk, A.V.⁷ Hua, G.C.⁸ Otsuka, N.⁹

4
- 0006181847
- J.C. Zolper, R.J. Shul, A.G. Baca, R.G. Wilson, S.J. Pearson and R.A. Stall, Appl. Phys. Lett. 68 (1996) 2273.
- (1996) Appl. Phys. Lett. , vol.68 , pp. 2273
- Zolper, J.C.¹ Shul, R.J.² Baca, A.G.³ Wilson, R.G.⁴ Pearson, S.J.⁵ Stall, R.A.⁶

5
- 0042650043
- J.I. Pankove and J.A. Hutchby, Appl. Phys. Lett. 24 (1974) 281.
- (1974) Appl. Phys. Lett. , vol.24 , pp. 281
- Pankove, J.I.¹ Hutchby, J.A.²

6
- 0017291752
- J.I. Pankove and J.A. Hutchby, J. Appl. Phys. 47 (1976) 5387.
- (1976) J. Appl. Phys. , vol.47 , pp. 5387
- Pankove, J.I.¹ Hutchby, J.A.²

7
- 21544433854
- S.J. Pearton, C.B. Vartuli, J.C. Zolper, C. Yuan and R.A. Stall, Appl.Phys. Lett. 67 (1995) 1435.
- (1995) Appl.phys. Lett. , vol.67 , pp. 1435
- Pearton, S.J.¹ Vartuli, C.B.² Zolper, J.C.³ Yuan, C.⁴ Stall, R.A.⁵

8
- 33751127103
- T.W. Weeks, Jr., M.D. Bremser, K.S. Alley, E. Carlson, W.G. Perry and R.F. Davis, Appl. Phys. Lett. 67 (1995) 401.
- (1995) Appl. Phys. Lett. , vol.67 , pp. 401
- Weeks T.W., Jr.¹ Bremser, M.D.² Alley, K.S.³ Carlson, E.⁴ Perry, W.G.⁵ Davis, R.F.⁶

9
- 0003412161
- Pergamon, New York
- J.F. Ziegler, J.P. Biersack and U. Littmark, in: The Stopping and Range of Ions in Matter, Vol. 1 (Pergamon, New York, 1985).
- (1985) The Stopping and Range of Ions in Matter , vol.1
- Ziegler, J.F.¹ Biersack, J.P.² Littmark, U.³

10
- 5944246702
- R. Dingle, D.D. Sell, S.E. Stokowski and M. Ilegems, Phys. Rev. B 4 (1971) 1211.
- (1971) Phys. Rev. B , vol.4 , pp. 1211
- Dingle, R.¹ Sell, D.D.² Stokowski, S.E.³ Ilegems, M.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.