Effect of the Gas Mixing Ratio on the Plasma Parameters and the Gas Phase Composition in Cl 2/CF 4 Inductively Coupled Plasmas

Journal of the Korean Physical Society

Volumn 43, Issue 6, 2003, Pages 1042-1048

  Efremov, A M ^a   Kim, Dong Pyo ^a   Kim, Chang Il ^a  

^a Chung Ang University   (South Korea)

Author keywords

Cl 2 CF 4; Dissociation; Electron temperature; Ionization

Indexed keywords

EID: 0346391048     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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