Effects of high-flux low-energy ion bombardment on the low-temperature growth morphology of TiN(001) epitaxial layers

Physical Review B - Condensed Matter and Materials Physics

Volumn 61, Issue 23, 2000, Pages 16137-16143

  Karr, Brian W ^a   Cahill, David G ^a   Petrov, I ^a   Greene, J ^a  

^a United States of America   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001527566     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.61.16137     Document Type: Article

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