Influence of the high-temperature "firing" step on high-rate plasma deposited silicon nitride films used as bulk passivating antireflection coatings on silicon solar cells

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 5, 2003, Pages 2123-2132

  Hong, J ^a   Kessels, W M M ^a   Soppe, W J ^b   Weeber, A W ^b   Arnoldbik, W M ^c   Van De Sanden, M C M ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b TNO   (Netherlands)

^c UTRECHT UNIVERSITY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ANTIREFLECTION COATINGS; COMPOSITION EFFECTS; DENSITY (SPECIFIC GRAVITY); ELLIPSOMETRY; FIRING (OF MATERIALS); FOURIER TRANSFORM INFRARED SPECTROSCOPY; HIGH TEMPERATURE EFFECTS; OPTICAL PROPERTIES; PASSIVATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON SOLAR CELLS; THERMODYNAMIC STABILITY;

ELASTIC RECOIL DETECTION; MASS DENSITY; MULTICRYSTALLINE SILICON SOLAR CELLS; SPECTROSCOPIC ELLIPSOMETRY;

SILICON NITRIDE;

EID: 0242497608     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1609481     Document Type: Article

References (50)

1. J. T. Milek. Silicon Nitride for Microelectronic Applications, Part 2: Applications and Devices, Handbook of Electronic Materials (IFI/Plenum, New York, 1972), Vol. 6.
2. V. I. Belyi, L. L. Vasilyeva, A. S. Ginkvker, V. A. Gritsenko, S. M. Repinsky, S. P. Sinitsa, T. P. Smirnova, and F. L. Edelman, Silicon Nitride in Electronics, Material Science Monographs (Elsevier, Amsterdam, 1998), p. 34.
3. A. G. Aberle, T. Lauinger, and R. Hezel, Proceedings of the 14th European Photovoltaic Solar Energy Conference, Barcelona, Spain (1997), p. 684.
4. P. Doshi, G. E. Jellison, Jr., and A. Rohatgi, Appl. Opt. 36, 7826 (1997).
5. S. Winderbaum, F. Yun, and O. Reinhold, J. Vac. Sci. Technol. A 15, 1020 (1997).
6. A. G. Aberle, Sol. Energy Mater. Sol. Cells 65, 239 (2001).
7. F. Duerinckx and J. Szlufcik, Sol. Energy Mater. Sol. Cells 72, 231 (2002).
8. J. Schmidt and M. Kerr, Sol. Energy Mater. Sol. Cells 65, 585 (2001).
9. R. Lüdemann, Mater. Sci. Eng., B 58, 86 (1999).
10. W. M. Arnoldbik, R. N. H. Linssen, F. H. P. M. Habraken, W. F. van der Weg, and A. E. T. Kuiper, Appl. Phys. Lett. 56, 2530 (1990).
11. C. Boehme and G. Lucovsky, J. Appl. Phys. 88, 6055 (2000)
12. J. Vac. Sci. Technol. A 19, 2622 (2001)
13. J. Non-Cryst. Solids 299-302, 1157 (2002).
14. B. L. Sopori, X. Deng, J. P. Benner, A. Rohatgi, P. Sana, S. K. Estreicher, Y. K. Park, and M. A. Roberson, Sol. Energy Mater. Sol. Cells 41/42, 159 (1996).
15. J.-W. Jeong, M. D. Rosenblum, J. P. Kalejs, and A. Rohatgi, J. Appl. Phys. 87, 7551 (2000).
16. L. Cai, A. Rohatgi, D. Yang, and M. A. El-Sayed, J. Appl. Phys. 80, 5384 (1996).
17. V. Yelundur, A. Rohatgi, A. Ebong, A. M. Gabor, J. Hanoka, and R. L. Wallace, J. Electron. Mater. 30, 526 (2001).
18. A. Rohatgi, V. Yelundur, J. Jeong, A. Ebong, M. D. Rosenblum, and J. I. Hanoka, Sol. Energy Mater. Sol. Cells 74, 117 (2002).
19. J. Hong, W. M. M. Kessels, F. J. H. van Assche, H. C. Rieffe, W. J. Soppe, A. W. Weeber, and M. C. M. van de Sanden Prog. Photovoltaics 11, 125 (2003).
20. J. Hong, W. M. M. Kessels, F. J. H. van Assche, W. M. Arnoldbik, H. C. Rieffe, W. J. Soppe, A. W. Weeber, and M. C. M. van de Sanden, Proceedings of the 29th IEEE Photovoltaic Specialists Conference, New Orleans (2002), p. 154
21. W. M. M. Kessels, J. Hong, F. J. H. van Assche, M. D. Moschner, T. Lauinger, W. J. Soppe, A. W. Weeber, D. C. Schram, and M. C. M. van de Sanden, J. Vac. Sci. Technol. A 20, 1704 (2002).
22. W. M. M. Kessels, R. J. Severens, A. H. M. Smets, B. A. Korevaar, G. J. Adriaenssens, D. C. Schram, and M. C. M. van de Sanden, J. Appl. Phys. 89, 2404 (2001).
23. W. M. M. Kessels, F. J. H. van Assche, J. Hong, J. D. Moschner, T. Lauinger, D. C. Schram, and M. C. M. van de Sanden, Mater. Res. Soc. Symp. Proc. 664, A8.6.1 (2001).
24. W. J. Soppe, C. Devileé, S. E. A. Schiermeier, J. Hong, W. M. M. Kessels, M. C. M. van de Sanden, W. M. Arnoldbik, and A. W. Weeber, Proceedings of the 17th European Photovoltaic Solar Energy Conference and Exhibition, Munich, Germany (2001) p. 1543.
25. W. J. Soppe, B. G. Duijvelaar, S. E. A. Schiermeier, A. W. Weeber, A. Steiner, and F. M. Schuurmans, Proceedings of the 16th European Photovoltaic Solar Energy Conference, Glasgow, U.K. (2000), p. 1420.
26. W. J. Soppe, J. Hong, W. M. M. Kessels, M. C. M. van de Sanden, W. M. Arnoldbik, H. Schlemm, C. Devileé, H. Rieffe, S. E. A. Schiermeier, J. H. Bultman, and A. W. Weeber, Proceedings of the 29th IEEE Photovoltaic Specialists Conference, New Orleans (2002), p. 158.
27. W. M. Arnoldbik, and F. H. P. M. Habraken, Rep. Prog. Phys. 56, 859 (1993).
28. C. H. M. Marée, A. M. Vrendenberg, and F. H. P. M. Habraken, Mater. Chem. Phys. 46, 198 (1996).
29. G. E. Jellison, Jr. and F. A. Modine, Appl. Phys. Lett. 69, 371, (1996)
30. 69, 2137 (1996).
31. S. Lee and J. Hong, Jpn. J. Appl. Phys., Part 1 39, 241 (2000).
32. J. Hong, A. Goullet, and G. Turban, Thin Solid Films 352, 41 (1999).
33. J. W. A. M. Gielen, D. C. Schram, and M. C. M. van de Sanden, Thin Solid Films 271, 56 (1995).
34. F. Demichelis, F. Giorgis, and C. F. Pirri, Philos. Mag. B 74, 155 (1996).
35. S. Hasegawa, L. He, Y. Amano, and T. Inokuma, Phys. Rev. B 48, 5315 (1993).
36. W. S. Liao, C. H. Lin, and S. C. Lee, Appl. Phys. Lett. 65, 2229 (1994).
37. D. L. Smith, A. S. Alimonda, and F. J. von Preissig, J. Vac. Sci. Technol. B 8, 551 (1990).
38. D. L. Smith, A. S. Alimonda, C.-C. Chen, S. E. Ready, and B. Wacker, J. Electrochem. Soc. 137, 614 (1990).
39. D. L. Smith, J. Vac. Sci. Technol. A 11, 1843 (1993).
40. W. M. M. Kessels, F. J. H. van Assche, J. Hong, D. C. Schram, and M. C. van de Sanden, J. Vac. Sci. Technol (submitted).
41. G. Lucovsky, J. Vac. Sci. Technol. 16, 1225 (1979).
42. J. Robertson, Philos. Mag. B 69, 307 (1994).
43. Z. Lu, P. Santos-Filho, G. Stevens, M. J. Williams, and G. Lucovsky, J. Vac. Sci. Technol. A 13, 607 (1995).
44. P. Santos-Filho, G. Stevens, Z. Lu, K. Koh, and G. Lucovsky, Mater. Res. Soc. Symp. Proc. 398, 3102 (1996).
45. H. Akazawa, Appl. Phys. Lett. 80, 3102 (2002).
46. C. M. M. Denisse, K. Z. Troost, F. H. P. M. Habraken, and W. F. van der Weg, J. Appl. Phys. 60, 2543 (1986).
47. S. A. Alterovitz, M. A. Drotos, and P. G. Young, Mater. Res. Soc. Symp. Proc. 284, 45 (1993).
48. W. D. Brown and M. A. Khaliq, Thin Solid Films 186, 73 (1990).
49. B. Lenkeit, S. Steckemetz, F. Artuso, and R. Hezel, Sol. Energy Mater. Sol. Cells 65, 317 (2001).
50. M. Bijker, private communication (2002).