|
Volumn 41-42, Issue , 1996, Pages 159-169
|
Hydrogen in silicon: A discussion of diffusion and passivation mechanisms
a a a b b c c c |
Author keywords
[No Author keywords available]
|
Indexed keywords
ALLOYING;
ALUMINUM;
ANNEALING;
CHEMICAL REACTORS;
CHEMICAL VAPOR DEPOSITION;
DEFECTS;
DIFFUSION IN SOLIDS;
DISSOCIATION;
HYDROGEN;
INCLUSIONS;
MATHEMATICAL MODELS;
PASSIVATION;
DEGREE OF PASSIVATION;
HYDROGEN VACANCY COMPLEX FORMATION;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
STATIC POTENTIAL ENERGY SURFACES;
SILICON SOLAR CELLS;
|
EID: 0030169785
PISSN: 09270248
EISSN: None
Source Type: Journal
DOI: 10.1016/0927-0248(95)00098-4 Document Type: Article |
Times cited : (167)
|
References (27)
|