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Volumn 41-42, Issue , 1996, Pages 159-169

Hydrogen in silicon: A discussion of diffusion and passivation mechanisms

Author keywords

[No Author keywords available]

Indexed keywords

ALLOYING; ALUMINUM; ANNEALING; CHEMICAL REACTORS; CHEMICAL VAPOR DEPOSITION; DEFECTS; DIFFUSION IN SOLIDS; DISSOCIATION; HYDROGEN; INCLUSIONS; MATHEMATICAL MODELS; PASSIVATION;

EID: 0030169785     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/0927-0248(95)00098-4     Document Type: Article
Times cited : (167)

References (27)
  • 16
    • 0041899984 scopus 로고
    • Symposium, defect engineering in semiconductor growth, processing, and device technology
    • Bhushan L. Sopori, Symposium, Defect Engineering in Semiconductor Growth, Processing, and Device Technology, MRS Proc. 262 (1992) 407.
    • (1992) MRS Proc. , vol.262 , pp. 407
    • Sopori, B.L.1
  • 21
    • 30244470696 scopus 로고    scopus 로고
    • note
    • 1/2 to correct for the effect of mass.
  • 25
    • 30244446144 scopus 로고    scopus 로고
    • unpublished results
    • S.K. Estreicher, unpublished results.
    • Estreicher, S.K.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.