Hydrogen passivation of multicrystalline silicon solar cells

Materials Science and Engineering: B

Volumn 58, Issue 1-2, 1999, Pages 86-90

  Lüdemann, Ralf ^a  

^a FRAUNHOFER INSTITUTE FOR SOLAR ENERGY SYSTEMS ISE   (Germany)

Author keywords

Grain boundaries; Hydrogen; Multicrystalline silicon; Passivation; Remote plasma; Solar cells

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTALLINE MATERIALS; GRAIN BOUNDARIES; HYDROGEN; ION IMPLANTATION; PASSIVATION;

ELECTROMAGNETIC CASTING; LOW ENERGY HYDROGEN ION IMPLANTATION (HII); MULTICRYSTALLINE SOLAR CELLS; REMOTE PLASMA HYDROGEN PASSIVATION (RPHP);

SILICON SOLAR CELLS;

HYDROGEN; PASSIVATION;

EID: 0033548050     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(98)00288-8     Document Type: Article

References (11)

1. S.J. Pearton, J.W. Corbett, T.S. Shi, Appl. Phys. A43 (1987) 153.
2. R Schindler, M. Kaiser, 21st IEEE-PVSC, Kissimimee, USA, 1990, p. 691.
3. M. Pirzer, R. Schindler, Polycrystalline Semiconductors, Springer Proc. Phys. 35 (1998) 122.
4. R. Lüdemann, R.R. Bilyalov, C. Schetter, 14th EU-PVSEC, Barcelona, Spain, 1997, p. 780.
5. B.L. Sopori, et al., Sol. Energy Mater. Sol. Cells 41/41 (1996) 159.
6. C. Schetter, H. Lautenschlager, F. Lutz, 13th EU-PVSEC, Nice, France, 1995, p. 407.
7. R. Lüdemann, S. Schaefer, U. Schubert, H. Lautenschlager, 14th EU-PVSEC, Barcelona, Spain, 1997, p. 131.
8. H.E. Elgamel, et al., IEEE 1st WCPEC, Hawaii, USA, 1994, p. 1323.
9. M. Speigel, et al., 14th EU-PVSEC, Barcelona, Spain, 1997, p. 743.
10. R.R. Bilalov, M.S. Saidov, V.P. Chirva, Appl. Sol. Energy 26 (1990) 40.
11. W. Warta, J. Sutler, R. Schindler, B.F. Wagner, 2nd WCPEC, Vienna, Austria (1998) (Submitted for publication).