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Volumn 11, Issue 2, 2003, Pages 125-130

Bulk passivation of multicrystalline silicon solar cells induced by high-rate-deposited (>1 nm/s) silicon nitride films

Author keywords

Bulk passivation; Firing process; High rate deposition; Internal quantum efficiency; Multicrystalline silicon; Silicon nitride; Solar cells

Indexed keywords

ANTIREFLECTION COATINGS; DEPOSITION; PASSIVATION; QUANTUM EFFICIENCY; SILICON NITRIDE; THERMODYNAMIC STABILITY; THIN FILMS;

EID: 0037343281     PISSN: 10627995     EISSN: None     Source Type: Journal    
DOI: 10.1002/pip.468     Document Type: Article
Times cited : (27)

References (11)
  • 1
    • 0035194554 scopus 로고    scopus 로고
    • Overview on SiN surface passivation of crystalline silicon solar cells
    • Aberle AG. Overview on SiN surface passivation of crystalline silicon solar cells. Solar Energy Materials and Solar cells 2001; 65: 239-248.
    • (2001) Solar Energy Materials and Solar Cells , vol.65 , pp. 239-248
    • Aberle, A.G.1
  • 4
    • 0035199111 scopus 로고    scopus 로고
    • Highest-quality surface passivation of low-resistivity p-type silicon using stoichiometric PECVD silicon nitride
    • Schmidt J, Kerr M. Highest-quality surface passivation of low-resistivity p-type silicon using stoichiometric PECVD silicon nitride. Solar Energy Materials and Solar Cells 2001; 65: 585-591.
    • (2001) Solar Energy Materials and Solar Cells , vol.65 , pp. 585-591
    • Schmidt, J.1    Kerr, M.2
  • 5
    • 0036533157 scopus 로고    scopus 로고
    • Defect passivation of industrial multicrystalline solar cells based on PECVD silicon nitride
    • Duerinckx F, Szlufcik J. Defect passivation of industrial multicrystalline solar cells based on PECVD silicon nitride. Solar Energy Materials and Solar Cells 2002; 72: 231-246.
    • (2002) Solar Energy Materials and Solar Cells , vol.72 , pp. 231-246
    • Duerinckx, F.1    Szlufcik, J.2
  • 11
    • 0035194556 scopus 로고    scopus 로고
    • Excellent thermal stability of remote plasma-enhanced chemical vapour deposited silicon nitride films for the rear of screen-printed bifacial silicon solar cells
    • Lenkeit B, Steckemetz S, Artuso F, Hezel R. Excellent thermal stability of remote plasma-enhanced chemical vapour deposited silicon nitride films for the rear of screen-printed bifacial silicon solar cells. Solar Energy Materials and Solar Cells 2001; 65: 317-323.
    • (2001) Solar Energy Materials and Solar Cells , vol.65 , pp. 317-323
    • Lankeit, B.1    Steckemetz, S.2    Artuso, F.3    Hezel, R.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.