Low stress thick diamond-like carbon films prepared by filtered arc deposition for tribological applications

Surface and Coatings Technology

Volumn 154, Issue 2-3, 2002, Pages 289-293

  Sheeja, D ^a   Tay, B K ^a   Yu, L ^a   Lau, S P ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Diamond like carbon; Filtered arc deposition; Low stress; Thick films; Tribology

Indexed keywords

DIAMONDS; FRICTION; MICROSTRUCTURE; MORPHOLOGY;

FILTERED CATHODIC VACUUM ARC (FCVA) TECHNIQUES;

TRIBOLOGY;

CARBON; DIAMOND-LIKE CARBON; FILM; STRESS; TRIBOLOGY;

EID: 0037094456     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00005-1     Document Type: Article

References (15)