Investigation of Si-doped diamond-like carbon films synthesized by plasma immersion ion processing

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 5, 2000, Pages 2143-2148

  He, X M ^a   Walter, K C ^a   Nastasi, M ^a   Lee, S T ^b   Fung, M K ^b  

^a LOS ALAMOS NATIONAL LABORATORY   (United States)

^b CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

ION BEAM LITHOGRAPHY; POLYMETHYL METHACRYLATES; RAMAN SCATTERING; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING; ULTRAVIOLET SPECTROSCOPY;

CARBON FILMS; DIAMOND-LIKE CARBON (DLC); PLASMA IMMERSION ION PROCESSING;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0034273834     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1286141     Document Type: Article

References (29)

1. S. Neuville and A. Matthews, MRS Bull. 22, 22 (1997).
2. J. C. Angus, P. Koidl, and S. Domitz, in Plasma Deposited Thin Films, edited by J. Mort and F. Jansen (Chemical Rubber Corp., Boca Raton, FL, 1988), p. 89.
3. A. Schenk, B. Winter, C. Lutterloh, J. Biener, U. A. Schubert, and J. Kuppers, J. Appl. Phys. 77, 6006 (1995);
4. J. Nucl. Mater. 220-222, 767 (1995).
5. X. Zhang, W. H. Weber, W. C. Vassell, T. J. Potter, and M. A. Tamor, J. Appl. Phys. 83, 2820 (1998).
6. X. M. He, L. Shu, W.-Z. Li, and H.-D. Li, J. Mater. Res. 12, 1595 (1997).
7. K. Oguri and T. Trai, J. Mater. Res. 7, 1313 (1992),
8. K. Oguri and T. Trai, J. Mater. Res. 5, 2567 (1990).
9. W. C. Vassell, A. K. Gangopadhyay, T. J. Potter, M. A. Tamor, and M. J. Rokosz, J. Mater. Eng. Perform. 6, 426 (1997).
10. W.-J. Wu, T.-M. Pai, and M.-H. Hon, Diamond Relat. Mater. 7, 1478 (1998).
11. D. H. Lee, X. M. He, K. C. Walter, M. Nastasi, J. R. Tesmer, M. Tuszewski, and D. R. Tallant, Appl. Phys. Lett. 73, 2423 (1998).
12. X. M. He, D. H. Lee, K. C. Walter, D. Q. Li, and M. Nastasi, J. Mater. Res. 14, 2080 (1999).
13. X. M. He, K. C. Walter, and M. Nastasi, J. Phys.: Condens. Matter 12, L183 (2000).
14. Joseph R. Tesmer and Michael Nastasi, Handbook of Modern Ion Beam Materials Analysis (Materials Research Society, Pittsburgh, PA, 1995), pp. 37-139.
15. L. R. Doolittle, Nucl. Instrum. Methods Phys. Res, B 9, 344 (1985);
16. L. R. Doolittle, Nucl. Instrum. Methods Phys. Res, B 15, 227 (1986).
17. X. M. He, K. C. Walter, M. Nastasi, S. T. Lee, and X. S. Sun, Thin Solid Films 355-356, 167 (1999).
18. S. Prawer, K. W. Nugent, Y. Lifshitz, G. D. Lempert, E. Grossman, J. Kulik, I. Avigal, and R. Kalish, Diamond Relat. Mater. 5, 433 (1996).
19. D. G. McCulloch, S. Prawer, and A. Hoffman, Phys. Rev. B 50, 5909 (1994).
20. M. A. Tamor and W. C. Vassell, J. Appl. Phys. 76, 3823 (1994).
21. J. Robertson, Surf. Coat. Technol. 50, 185 (1992).
22. X. M. He, J.-F. Bardeau, K. C. Walter, and M. Nastasi, J. Vac. Sci. Technol. A 17, 2525 (1999).
23. J. Mencik, D. Munz, E. Quandt, E. R. Weppelmann, and M. V. Swain, J. Mater. Res. 12, 2475 (1997).
24. D. J. Li, F. Z. Cui, and H. Q. Gu, Appl. Surf. Sci. 137, 30 (1999).
25. S. Uhlmann, Th. Frauenheim, and Y. Lifshitz, Phys. Rev. Lett. 81, 641 (1998).
26. D. R. McKenzie, D. Muller, and B. A. Pailthorpe, Phys. Rev. Lett. 67, 773 (1991).
27. J. W. Ager III, IEEE Trans. Magn. 29, 259 (1993).
28. D. H. Lee, S. Fayeulle, K. C. Walter, and M. Nastasi, Nucl. Instrum. Methods Phys. Res. B 148, 216 (1998).
29. X.-M. He, S.-T. Lee, I. Bello, A. C. Cheung, and C. S. Lee, J. Mater. Res. 14, 1055 (1999).