Reactivity of vapor-deposited metal atoms with nitrogen-containing polymers and organic surfaces studied by in situ XPS

Applied Surface Science

Volumn 219, Issue 3-4, 2003, Pages 317-328

  Wagner, Anthony J ^a   Wolfe, Glenn M ^a   Fairbrother, D Howard ^a,b  

^a JOHNS HOPKINS UNIVERSITY   (United States)

^b Johns Hopkins University   (United States)

Author keywords

Metal polymer complexes; Nylon; Surfaces; Thermodynamics

Indexed keywords

CHEMICAL BONDS; ION BEAMS; METALLIZING; NITROGEN; SELF ASSEMBLY; VAPOR DEPOSITION; X RAY PHOTOELECTRON SPECTROSCOPY;

ORGANIC SURFACES;

SURFACE CHEMISTRY;

EID: 0142185012     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(03)00705-0     Document Type: Article

References (78)

1. Sanda P.N., Bartha J.W., Clabes J.G., Jordan J.L., Feger C., Silverman B.D., Ho P.S. J. Vac. Sci. Technol. A. 4:1986;1035.
2. Ho P.S., Hahn P.O., Bartha J.W., Rubloff G.W., LeGoues F.K., Silverman B.D. J. Vac. Sci. Technol. A. 3:1985;739.
3. Ektessabi A.M., Hakamata S. Thin Solid Films. 377-378:2000;621.
4. Chou N.J., Tang C.H. J. Vac. Sci. Technol. A. 2:1984;751.
5. Freilich S.C., Ohuchi F.S. Polymer. 28:1987;1908.
6. Strunskus T., Hahn C., Frankel D., Grunze M. J. Vac. Sci. Technol. A. 9:1991;1272.
7. Mittal K.L. J. Vac. Sci. Technol. 13:1976;19.
8. D.R. Jung, B. Ibidunni, M. Ashraf, AIP Conference Proceedings 449 (Characterization and Metrology for ULSI Technology), 1998, p. 943.
9. Mack R.G., Grossman E., Unertl W.N. J. Vac. Sci. Technol. A. 8:1990;3827.
10. Wightman J.P., Lin T.D., Webster H.F. Int. J. Adhesion Adhesives. 12:1992;133.
11. Wu P.K. Mater. Res. Soc. Symp. Proc. 385:1995;79.
12. Kim N.Y., Yoon H.-S., Kim S.Y., Whang C.N., Kim K.W., Cho S.J. J. Vac. Sci. Technol. B. 17:1999;380.
13. R.P. Howson, A.G. Spencer, K. Oka, R.W. Lewin, Metallized plastics 1 - fundamental and applied aspects, in: K.L. Mittal, J.R. Susko (Eds.), Plenum Press, New York, 1989, p. 45.
14. K.M. Anetsberger, Metallized plastics 1 - fundamental and applied aspects, in: K.L. Mittal, J.R. Susko (Eds.), Plenum Press, New York, 1989, p. 29.
15. Bou M., Martin J.M., Le Monge T. Appl. Surf. Sci. 47:1991;149.
16. Ebe A., Takahashi E., Kuratani N., Nishiyama S., Imai O., Ogata K., Setsuhara Y., Miyake S. Nucl. Instr. Meth. Phys. Res. B. 121:1997;207.
17. Pertsin A.J., Pashunin Y.M. Appl. Surf. Sci. 47:1991;115.
18. A.J. Wagner, D.H. Fairbrother, F. Reiners, Plasmas and Polymers 8 (2003) 119.
19. Opila R.L., Eng J. jr. Prog. Surf. Sci. 69:2002;125.
20. Ebe A., Takahashi E., Iwamoto Y., Kuratani N., Nishiyama S., Imai O., Ogata K., Setsuhara Y., Miyake S. Thin Solid Films. 281-282:1996;356.
21. Suzuki T., Makino Y., Samandi M., Miyake S. J. Mater. Sci. 35:2000;4193.
22. Kupfer H., Wolf G.K. Nucl. Instr. Meth. Phys. Res. B. 166-167:2000;722.
23. Zaporojtchenko V., Strunskus T., Behnke K., Bechtolsheim C.-V., Kiene M., Faupel F. J. Adhesion Sci. Technol. 14:2000;467.
24. Sacher E. Prog. Surf. Sci. 47:1994;273.
25. Du M., Opila R.L., Case C. J. Vac. Sci. Technol. A. 16:1998;155.
26. Chang C.-A. Appl. Phys. Lett. 51:1987;1236.
27. Chang C.-A., Kim Y.-K., Schrott A.G. J. Vac. Sci. Technol. A. 8:1990;3304.
28. Shi M.K., Lamontagne B., Selmani A., Martinu L., Sacher E., Wertheimer M.R., Yelon A. J. Vac. Sci. Technol. A. 12:1994;807.
29. Shi M.K., Lamontagne B., Selmani A., Martinu L., Sacher E., Wertheimer M.R., Yelon A. J. Vac. Sci. Technol. A. 12:1994;29.
30. Bebin P., Prud'homme R.E. J. Polym. Sci. B: Polym. Phys. 40:2002;82.
31. Oultache A.K., Prud'homme R.E. Polym. Adv. Technol. 11:2000;316.
32. Bebin P., Prud'homme R.E. J. Vac. Sci. Technol. A. 20:2002;1611.
33. Shi M.K., Selmani A., Martinu L., Sacher E., Wertheimer M.R., Yelon A. J. Adhesion Sci. Technol. 8:1994;1129.
34. Wolany D., Fladung T., Duda L., Lee J.W., Gantenfort T., Wiedmann L., Benninghoven A. Surf. Interface Anal. 27:1999;609.
35. Arefi-Khonsari F., Tatoulian M., Kurdi J., Amouroux J. High Temp. Mater. Process. 4:2000;537.
36. Collaud M., Groening P., Nowak S., Schlapbach L. J. Adhesion Sci. Technol. 8:1994;1115.
37. D. Mann, J. Fessmann, G. Kampschulte, K. Mertz, Metallized plastics 3: fundamental and applied aspects, in: K.L. Mittal (Ed.), Plenum Press, New York, 1992, p. 295.
38. V. Legois, M. Aucouturier, E. Ollivier, E. Darque-Ceretti, P. Macheto, in: T.S. Sudarshan, M. Jeandin, K.A. Khor (Eds.), Surface Modification Technologies XI, The Institute of Materials, London, 1998.
39. Legois V., Aucouturier M., Ollivier E., Darque-Ceretti E., Macheto P. Surf. Eng. 14:1998;259.
40. Carlo S.R., Perry C.C., Torres J., Wagner A.J., Vecitis C., Fairbrother D.H. Appl. Surf. Sci. 195:2002;93.
41. A.J. Wagner, D.H. Fairbrother, F. Reniers, Plasmas and Polymers, in press.
42. Toth A., Bell T., Bertoti I., Mohai M., Zelei B. Nucl. Instr. Meth. Phys. Res. B. 148:1999;1131.
43. Jung D.R., Czanderna A.W. Crit. Rev. Solid State Mater. Sci. 19:1994;1.
44. Carlo S.R., Perry C., Torres J., Fairbrother D.H. J. Vac. Sci. Technol. A. 20:2002;350.
45. C.C. Chusuei, D.W. Goodman, Encyclopedia of Physical Science and Technology, Academic Press, 2002, p. 921.
46. Wagner A.J., Han K., Vaught A.L., Fairbrother D.H. J. Phys. Chem. B. 104:2000;3291.
47. Barth G., Linder R., Bryson C. Surf. Interface Anal. 11:1988;307.
48. Takahagi T., Nakayama Y., Soeda F., Ishitani A. J. Appl. Polym. Sci. 41:1990;1451.
49. Coffey T., Urquhart S.G., Ade H. J. Electron Spectrosc. Relat. Phenom. 122:2002;65.
50. Gao J., Mao S., Liu J., Feng D. Wear. 212:1997;238.
51. Vogt K.W., Naugher L.A., Kohl P.A. Thin Solid Films. 256:1995;106.
52. Diekmann W., Panzner G., Grabke H.J. Surf. Sci. 218:1998;507.
53. Paparazzo E. J. Electron Spectrosc. Relat. Phenom. 43:1987;97.
54. Brion D. Appl. Surf. Sci. 5:1980;133.
55. Paparazzo E. Surf. Interface Anal. 12:1988;115.
56. McIntyre N.S., Zetaruk D.G. Anal. Chem. 49:1977;1521.
57. Burkstrand J.M. J. Appl. Phys. 52:1981;4795.
58. Shabanova I.N., Trapeznikov V.A. J. Electron Spectrosc. Relat. Phenom. 6:1975;297.
59. Liu Z.Q., Wang W.J., Wang T.M., Chao S., Zheng S.K. Thin Solid Films. 325:1998;55.
60. Kaushik V.K. Spectrochim. Acta, B. 44:1989;581.
61. Haight R., White R.C., Silverman B.D., Ho P.S. J. Vac. Sci. Technol. A. 6:1988;2188.
62. Herdt G.C., Jung D.R., Czanderna A.W. Prog. Surf. Sci. 50:1995;103.
63. Toth A., Bertoti I., Szilagyi E., Dong H., Bell T., Juhasz A., Nagy P.M. Surf. Interface Anal. 30:2000;434.
64. Petrat F.M., Wolany D., Schwede B.C., Wiedmann L., Benninghoven A. Surf. Interface Anal. 21:1994;274.
65. O'Kell S., Henshaw T., Farrow G., Aindow M., Jones C. Surf. Interface Anal. 23:1995;319.
66. Klemberg-Sapieha J.E., Kuttel O.M., Martinu L., Wertheimer M.R. J. Vac. Sci. Technol. A. 9:1991;2975.
67. Datta M., Mathieu H.J., Landolt D. Appl. Surf. Sci. 18:1984;299.
68. Burger K., Tschismarov F., Ebel H. J. Electron Spectrosc. Relat. Phenom. 10:1977;461.
69. Sanghera H.K., Sullivan J.L. Nucl. Instr. Meth. Phys. Res. B. 152:1999;65.
70. Yabe K., Nishimura O., Fujihana T., Iwaki M. Surf. Coat. Technol. 66:1994;250.
71. Oultache A.K., Prud'homme R.E. Polym. Adv. Technol. 11:2000;316.
72. Jung D.R., Czanderna A.W. Mater. Res. Soc. Symp. Proc. 304:1993;131.
73. Jung D.R., King D.E., Czanderna A.W. J. Vac. Sci. Technol. A. 11:1993;2382.
74. G.A. Somorjai, Introduction to Surface Chemistry and Catalysis, Wiley-Interscience, New York, 1994.
75. Alfa Aesar Catalog, Johnson Matthey Company, Ward Hill, 1999-2000, p. 1490.
76. J.E. Huheey, Inorganic Chemistry: Principles of Structure and Reactivity, Harper International SI Edition, Cambridge, 1983.
77. Khawaja E.E., Salim M.A., Khan M.A., Al-Adel F.F., Khattak G.D., Hussain Z. J. Non-Cryst. Solids. 110:1989;33.
78. Loechel B.P., Strehblow H.H. J. Electrochem. Soc. 131:1984;713.