Diffusion of copper into polyimide deposited by ionized cluster beai

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 2, 1999, Pages 380-384

  Kim, N Y ^a  

^a Yonsei University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 22644450231     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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