Microstructure and secular instability of the (Ti1-x,Alx)N films prepared by ion-beam-assisted-deposition

Journal of Materials Science

Volumn 35, Issue 16, 2000, Pages 4193-4199

  Suzuki, T ^a,b,c   Makino, Y ^a,b,c   Samandi, M ^a,b,c   Miyake, S ^a,b,c  

^a OSAKA UNIVERSITY   (Japan)

^b UNIVERSITY OF WOLLONGONG   (Australia)

^c NAGAOKA UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; ELECTRON DIFFRACTION; ENERGY DISPERSIVE SPECTROSCOPY; FILM PREPARATION; ION BOMBARDMENT; PHASE SEPARATION; SILICON WAFERS; SOLUBILITY; TITANIUM COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY; VAPOR DEPOSITION; X RAY CRYSTALLOGRAPHY;

ION BEAM ASSISTED DEPOSITION; SELECTED AREA ELECTRON DIFFRACTION;

THICK FILMS;

EID: 0034250038     PISSN: 00222461     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1004835111782     Document Type: Article

References (26)

1. M. WITTMER, J. NOSTER and H. MELCHIOR, J. Appl. Phys. 52 (1981) 6659.
2. O. KNOTEK, M. BÖHMER and T. LEYENDECKER, J. Vac. Sci. Technol. A4 (1986) 2695.
3. T. LEYENDECKER, O. LEMMER, S. ESSER and J. EBBERINK. Surf. Coat. Technol. 48 (1991) 175.
4. W. D. MÜNZ, J. Vac. Sci. Technol. A4 (1986) 2717.
5. H. ICHIMURA and A. KAWANA, J. Mater. Res. 8 (1993) 1093.
6. T. IKEDA and H. SATOH, Thin Solid Films 195 (1991) 99.
7. U. WAHLSTRÖM, L. HULTMAN, J.-E. SUNDGREN, F. ADIBI, I. PETROV and J. E. GREENE, ibid. 235 (1993) 62.
8. J. C. SCHUSTER and J. BAUER, J. Solid State Chem. 53 (1984) 260.
9. S. MIYAKE, K. HONDA, T. KOHNO, Y. SETSUHARA, A. CHAYAHARA and M. SATOU, J. Vac. Sci. Technol. A10 (1992) 3253.
10. T. J. BELL, J. S. FIELD and M. V. SWAN, Materials Forum 17 (1993) 127.
11. T. J. BELL, A. BENDELI, J. S. FIELD, M. V. SWAN and E. G. TKWAlTE, Metrologia 28 (1991/92) 463.
12. Y. SETSUHARA, H. OHSAKO, Y. MAKING and S. MIYAKE, Surf. Coat. Technol. 66 (1994) 495.
13. Y. SETSUHARA, T. SUZUKI, Y. MAKING, S. MIYAKE, T. SAKATA and H. MORI, ibid. 97 (1997) 254.
14. Y. MAKING, Y. SETSUHARA and S. MIYAKE, in Proc. 9th Intl. Conf. on Ion Beam Modification of Materials, Canberra, Australia, February, 1995, p. 735.
15. A. ZUNGER, Phys. Rev. 822 (1980) 5839.
16. W. A. HARRISON, "Electronic Structure and The Properties of Solids" (Freeman, San Francisco, CA, 1980) Ch. 3.
17. Y. MAKINO, Mater. Sci. and Eng. A192/193 (1995) 77.
18. Idem., Intermetallics 2 (1994) 55.
19. Idem., Mater. Sci. and Eng. A179/180 (1994) 238.
20. A. SUGISHIMA, H. KAJIOKA and Y. MAKINO, Surf. Coat. Technol. 97 (1997) 590.
21. Y. MAKING and K. NOGI, ibid. 98 (1998) 1008.
22. Y. MAKING, Mater. Sci. Eng. A192/193 (1995) 77.
23. J. R. ROOS, J. P. CELIS, E. VANCOILLE, H. VELTROP, S. BOELENS, F. JUNGBLUT, J. EBBERINK and H. HOMBERG, Thin Solids Films 193/194 (1990) 547.
24. Y. TANAKA, T. M. GÜR, M. KELLY, S. B. HAGSTROM and T. IKEDA, ibid. 228 (1993) 238.
25. M. L. COUEN, Phys. Rev. 832 (1985) 7988.
26. Y. MAKING, J. Alloys and Comp. 242 (1996) 122.