Plasma and ion beam assisted metallization of polymers and their application

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 166, Issue , 2000, Pages 722-731

  Kupfer, H ^a   Wolf, G K ^b  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^b UNIVERSITY OF HEIDELBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ATOMIC FORCE MICROSCOPY; BEAM PLASMA INTERACTIONS; COPPER; ELECTRIC CONDUCTIVITY MEASUREMENT; HIGH TEMPERATURE PROPERTIES; ION BOMBARDMENT; MAGNETRON SPUTTERING; METALLIZING; PLASMA ETCHING; SCANNING ELECTRON MICROSCOPY;

ION BEAM ASSISTED DEPOSITION (IBAD); STYLUS PROFILOMETRY;

POLYMERS;

EID: 0033748132     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(99)01192-1     Document Type: Article

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