3-D computational modeling of RF MEMS switches

2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001

Volumn , Issue , 2001, Pages 402-405

  Espinosa, H D ^a   Fischer, M ^a   Zhu, Y ^a   Lee, S ^a  

^a Northwestern University   (United States)

Author keywords

Computational Mechanics; Elasticity; Experimental Mechanics; MEMS; Radio Frequency

Indexed keywords

ALUMINUM ALLOYS; COMPUTATIONAL METHODS; COMPUTER SIMULATION; ELASTIC MODULI; ELASTICITY; LOADS (FORCES); MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; RADIO EQUIPMENT; RESIDUAL STRESSES; TENSILE STRENGTH;

COMPUTATIONAL MECHANICS; EXPERIMENTAL MECHANICS; MEMS; RADIO FREQUENCY (RF);

ELECTRIC SWITCHES;

EID: 6344286140     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. K. Peterson, "Micromechanical Membrane Switches on Silicon", IBM J. Res. Develop., 23, 376-385, 1979.
2. P. Zavracky and R. Morrison, Proc. of IEEE Solid State Sensor Conference, 1984.
3. J. Yao and M. Chang, Transducers'95, 384-387, 1995.
4. L. Larson, R. Hackett, M. Melendes and R. Lohr, IEEE Microwave Theory Tech. Symp., 27-30, 1991.
5. C. Goldsmith, Z. Yao, S. Eshelman and D. Denniston, IEEE Microwave and Guided Wave Letters, 8, 269-271, 1998.
6. C. Goldsmith, A. Malczewski, Z. Yao, S. Chen, J. Ehmke and D. Hinzel, International Journal of RF and Microwave Computer-Aided Eng., 9, 362-374, 1999.
7. S. Baker and W. Nix, J. of Materials Research, 9, 3131-3144, 1994.
8. M. Fischer, Master Thesis, Purdue University, West Lafayette, IN, 1999.