Micromachining of ultrananocrystalline diamond

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4557, Issue , 2001, Pages 288-298

  Moldovan, N ^a   Auciello, O ^a   Sumant, A V ^a   Carlisle, J A ^a   Divan, R ^a   Gruen, D M ^a   Krauss, A R ^a   Mancini, D C ^a   Jayatissa, A ^a   Tucek, J ^a  

^a ARGONNE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIOCOMPATIBILITY; ELASTIC MODULI; FRICTION; GRAIN SIZE AND SHAPE; HARDNESS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NANOSTRUCTURED MATERIALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMAS; REACTIVE ION ETCHING;

ULTRANANOCRYSTALLINE DIAMONDS;

DIAMONDS;

EID: 0042913388     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.442958     Document Type: Conference Paper

References (24)

1. Anton Heuberger (ed), Mikromechanik: Mikrofertigung mit Methoden d. Halbleitertechnologie, Berlin, Springer, 1989.
2. K.J. Gabriel, F. Behi, R. Mahadevan, and M. Mehregany; Sensors and Actuators A21-A23 (1990) 184.
3. M.N. Gardos, in Tribology Issues and Opportunities in MEMS, edited by B. Bushan, Kluwer Academic Publishers, The Netherlands (1998) p. 341.
4. M.N. Gardos, "Tribological fundamentals of polycrystalline diamond films," Surface and Coatings Technology 113 (1999), p. 183.
5. O. Auciello, A.R. Krauss, D.M. Gruen, H.G. Busmann, E.M. Meyer, J. Tucek, A. Sumant, A. Jayatissa, N. Moldovan, D.C. Mancini, and M.N. Gardos, "Two- and Three-Dimensional Ultrananocrystalline Diamond (UNCD) Structures for a High Resolution Diamond-Based MEMS Technology," Mat. Res. Soc. Symp. Proc. Vol. 605 (2000), p. 73.
6. D.M. Gruen, S. Liu, A.R. Krauss, J. Luo, and X. Pan, "Fullerenes as precursors for diamond film growth without hydrogen or oxygen additions," Appl. Phys. Lett. 64 (1994) p. 1502.
7. D.M. Gruen, S. Liu, A.R. Krauss, and X. Pan, "Buckyball microwave plasmas: Fragmentation and diamond-film growth," J. Appl. Phys. 75, (1994) p. 1758.
8. P.C. Redfern, D.A. Horner, L.A. Curtiss and D.M. Green, "Theoretical studies of growth of diamond (110) from dicarbon," J. Phys. Chem. 100 (1996) p. 11654.
9. D.M. Gruen, C.D.-G. Zuiker, A.R. Krauss, and X. Pan, "Carbon dimer, C2, as a growth species for diamond films from methane/hydrogen/argon microwave plasmas," J. Vac. Sci. Technol. A13 (1995) 1628.
10. A.V. Sumant, O. Auciello, A.R. Krauss, D.M. Green, D. Ersoy, J. Tucek, A. Jayatissa, E. Stach, N. Moldovan, D. Mancini, H.G. Busmann, and E.M. Meyer, "Fabrication of MEMS Components Based on Ultrananocrystalline Diamond Thin Films and Characterization of Mechanical Properties," Proc. of MRS, Vol. 657, Materials Science of Microelectromechanical Systems (MEMS) Devices III, Editors: M. deBoer, M. Judy, H. Kahn, S.M. Spearing, August 9-12, 1998.
11. M.D. Irwin, C.G. Pantano, P.Gluche, E. Khon, "Bias-enhanced nucleation of diamond on silicon dioxide," Appl. Phys. Lett. 71 (1997) p. 716.
12. L.C. Qin, D. Zhou, A.R. Krauss, and D.M. Gruen, "TEM Characterization of nanodiamond thin films," Nanostructured Mater. 10 (4), (1998) p. 649.
13. J.A. Nuth, "Small-Particle Physics and Interstellar Diamonds," Nature, 329 (1987) p. 589.
14. R. Csencsits, D.M. Gruen, A.R. Krauss and C. Zuiker, "TEM Study of Diamond Films Grown from Fullerene Precursors," Mat. Res. Soc. Symp. Proc. 403 (1996) p. 291.
15. D. Zhou, T.G. McCauley, L.C. Qin, A.R. Krauss, and D.M. Green, "Synthesis of nanocrystalline diamond thin films from an Ar-CH4 microwave plasma," J. Appl. Phys. 83 (1998) p. 540.
16. P. Keblinski, D. Wolf, S.R. Phillpot, and H. Gleiter, "Role of bonding and coordination in the atomic structure and energy of diamond and silicon grain boundaries," J. Mater. Res. 13 (1998) p. 2077; P. Keblinski, D. Wolf, F. Cleri, S.R. Phillpot, and H. Gleiter, "On the nature of grain boundaries in nanocrystalline diamond," MRS Bulletin, 23 (1998) p. 36.
17. P. Keblinski, D. Wolf, S.R. Phillpot, and H. Gleiter, "Role of bonding and coordination in the atomic structure and energy of diamond and silicon grain boundaries," J. Mater. Res. 13 (1998) p. 2077; P. Keblinski, D. Wolf, F. Cleri, S.R. Phillpot, and H. Gleiter, "On the nature of grain boundaries in nanocrystalline diamond," MRS Bulletin, 23 (1998) p. 36.
18. R. Rameshan, "Fabrication of Diamond Microstructures for Microelectromechanical Systems (MEMS) by a Surface Micromachining Process," Thin Solid Films 340 (1999) p. 1.
19. W. Kulisch, A. Malave, W. Scholz, C. Mihalcea, E. Oesterschulze, G.Lippold, "Fabrication of integrated diamond cantilevers with tips for SPM applications," Diamond Relat. Mater. 6 (5-7) (1997) p. 906.
20. T.A. Friedmann, J.P. Sullivan, J.A. Knapp, D.R. Tallant, D.M. Follstaedt, D.L. Medlin and P.B. Mirkarimi, "Thick stress-free amorphous-tetrahedral carbon films with hardness near that of diamond," Appl. Phys. Lett. 71 (1997) p. 3820.
21. 4 plasmas," Diamond Films and Technology 6 (1996) p. 31.
22. A.R. Kraus, O. Auciello, D.M. Gruen, A. Jayatissa, A. Sumant, J. Tucek, D.C. Mancini, N. Moldovan, A. Erdemir, D. Ersoy, M.N. Gardos, H.G. Busmann, E.M. Meyer, M.Q. Ding, "Ultrananocrystalline Diamond Thin Films for MEMS and Moving Mechanical Assembly Devices," Diamond and Related Materials, 2001 (in press).
23. A. Vescan, W. Ebert, T.H. Borst and E. Kohn, "Electrical characterisation of diamond resistors etched by RIE," Diamond and Related Materials 5 (1996) p. 747.
24. Steven Rodgers, J.J. Sniegowski, "Designing Microelectromechanical Systems-on-a-Chip in a 5-Level Surface Micromachine Technology," Presented at the 2nd International Conference on Engineering Design and Automation, Maui, Hawaii, August 9-12, 1998.