A hierarchical circuit-level design methodology for microelectromechanical systems

IEEE Transactions on Circuits and Systems II: Analog and Digital Signal Processing

Volumn 46, Issue 10, 1999, Pages 1309-1315

  Fedder, Gary K ^a   Jing, Qi ^b  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

Microelectromechanical systems (MEMS); Micromechanical behavioral modeling; Microsensor

Indexed keywords

ELECTRIC FILTERS; ELECTRIC NETWORK SYNTHESIS; MATHEMATICAL MODELS; MICROACTUATORS; MICROSENSORS;

MICROMECHANICAL BEHAVIORAL MODELING;

MICROELECTROMECHANICAL DEVICES;

EID: 0033351960     PISSN: 10577130     EISSN: None     Source Type: Journal    
DOI: 10.1109/82.799682     Document Type: Article

References (24)

1. J. M. Karam, B. Courtois, K. Hofmann, A. Poppe, M. Rencz, M. Glesner, and V. Szekely, "Micro-systems modeling at a system level," in Proc. APCHDL '96, Bangalore, India, pp. 8-10.
2. Microcosm Technologies, Inc., Gary, NC, MEMCAD webpage [Online]. Available HTTP: http://www.memcad.com
3. IntelliSense Corporation, Wilmington, MA, Intellisense webpage [Online]. Available HTTP: http://www.intellis.com
4. J. M. Funk, J. G. Korvink, J. Bühler, M. Bachtold, and H. Baltes, "SOLIDIS: A tool for microactuator simulation in 3-D," J. Microelec-tromech. Sysy., vol. 6, no. 1, pp. 70-82, Mar. 1997. Available HTTP: http://www.ise.ch/solidis
5. L. D. Gabbay and S. D. Senturia, "Automatic generation of dynamic macro-models using quasistatic simulations in combination with modal analysis," in Proc. 1998 Solid-State Sensors and Actuators Workshop, Hilton Head Island, SC, pp. 197-200.
6. J. E. Vandemeer, M. S. Kranz, and G. K. Fedder, "Hierarchical representation and simulation of micromachined inertial sensors," in Proc. 1998 Int. Conf. Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators (MSM '98), Santa Clara, CA, pp. 540-545.
7. I. Getreu, "Behavioral modeling of analog blocks using the SABER simulator," in Proc. Microwave Circuits and Systems, Aug. 1989, pp. 977-980.
8. N. Zhou, J. V. Clark, and K. S. J. Pister, "Nodal analysis for MEMS design using SUGAR vO.5," in Proc. 1998 Int. Conf. Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators (MSM '98), Santa Clara, CA, pp. 308-313.
9. J. V. Clark, N. Zhou, and K. S. J. Pister, "Fast, accurate MEMS simulation using SUGAR vO.5," in Proc. 1998 Solid-State Sensors and Actuators Workshop, Hilton Head Island, SC, pp. 191-196.
10. G. Lorenz and R. Neul, "Network-type modeling of micromachined sensor systems," in Proc. 1998 Int. Conf. Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators (MSM '98), Santa Clara, CA, pp. 223-238.
11. D. Teegarden, G. Lorenz, and R. Neul, "How to model and simulate microgyroscope systems," IEEE Spectrum, pp. 67-75, July 1998.
12. M. A. Mäher and H. J. Lee, "MEMS systems design and verification tools," in Proc. SPIE Smart Structures and Materials Conf., San Diego, CA, Mar. 1998, pp. 40-48.
13. ADXL50 Accelerometer Data Sheet. (1996). Analog Devices, Inc., Norwood, MA. Available HTTP: http://www.analog.com
14. Motorola Sensor Products. (1996). MMAS40G10D Accelerometer Data Sheet [Online]. Available HTTP: http://design-net.com/senseon
15. M. A. Mignardi, "Digital micromirror array for projection TV," Solid State Technol, vol. 37, no. 7, pp. 63-64, July 1994.
16. D. A. Koester, R. Mahadevan, and K. W. Markus, "Multi-user MEMS processes (MUMP's) introduction and design rules," MCNC MEMS Technology Applications Center, Research Triangle Park, NC, rev. 3, Oct. 1994, 39 pp.
17. W. C. Tang, T. C. H. Nguyen, M. W. Judy, and R. T. Howe, "Electrostatic comb drive of lateral polysilicon resonators," Sens. Actuators A, vol. 21, nos. 1-3, pp. 328-331, Feb. 1990.
18. K. Wang and C. T. C. Nguyen, "High-order micromechanical electronic filters," in Proc. IEEE MEMS Workshop, Nagoya, Japan, Jan. 26-30, 1997, pp. 25-30.
19. M. J. Daneman, N. C. Tien, O. Solgaard, K. Y. Lau, and R. S. Muller, "Linear vibromotor-actuated micromachined microreflector for integrated optical systems," in Proc. 1996 Solid-State Sensors and Actuators Workshop, Hilton Head Island, SC, pp. 109-112.
20. J. E. Vandemeer, M. S. Kranz, and G. K. Fedder, "Nodal simulation of suspended MEMS with multiple degrees of freedom," in Proc. 1997 Int. Mechanical Engineering Congress and Exposition: The Winter Annu. Meeting of ASME in the 8th Symp. Microelectromechanical Systems (DSC-vol. 62), Dallas, TX, pp. 113-118.
21. Carnegie Mellon MEMS Laboratory, Pittsburgh, PA, NOD AS web page [Online]. Available HTTP: http://www.ece.emu.edurmems/nodas.html
22. S. P. Przemieniecki, Theory of Matrix Structural Analysis. New York: McGraw-Hill, 1968.
23. X. Zhang and W. C. Tang, "Viscous air damping in laterally driven microresonators," Sensors and Materials, vol. 7, no. 6, pp. 415-430, 1995.
24. Hibbitt, Karlsson, and Sorensen, Inc., Pawtucket, RI, ABAQUS web page [Online]. Available HTTP: http://www.hks.com