Structured design of integrated MEMS

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 1-8

  Fedder, Gary K ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; CMOS INTEGRATED CIRCUITS; INTEGRATED CIRCUIT LAYOUT; ITERATIVE METHODS; MICROMACHINING; RAPID PROTOTYPING;

INTEGRATED MICROELECTROMECHANICAL SYSTEMS (MEMS); STRUCTURED DESIGN;

MICROELECTROMECHANICAL DEVICES;

EID: 0032627370     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.1999.746742     Document Type: Conference Paper

References (49)