In situ electrostatic microactuators for measuring the Young's modulus of CMOS thin films

Journal of Micromechanics and Microengineering

Volumn 13, Issue 5, 2003, Pages 563-567

  Dai, Ching Liang ^a  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; CMOS INTEGRATED CIRCUITS; DRY ETCHING; ELASTIC MODULI; ELECTROSTATIC ACTUATORS; MECHANICAL VARIABLES MEASUREMENT; POLYSILICON; SILICA; THIN FILMS;

MICROELECTROMECHANICAL SYSTEMS; SINGLE POLYSILICON THREE METAL;

MICROELECTROMECHANICAL DEVICES;

EID: 0141607149     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/5/306     Document Type: Article

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