An acceleration sensor in CMOS-compatible technology for integration in complex systems

Journal of Micromechanics and Microengineering

Volumn 7, Issue 3, 1997, Pages 193-195

  Lang, M ^a   Gleaner, M ^a  

^a DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMPLIFIERS (ELECTRONIC); CHEMICAL VAPOR DEPOSITION; CMOS INTEGRATED CIRCUITS; INTEGRATED CIRCUIT MANUFACTURE; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRICITY;

ACCELERATION SENSORS;

SENSORS;

EID: 0031223072     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/7/3/030     Document Type: Article

References (8)

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3. Vogel Th 1994 FEM-simulation von mechanischen mikrosystemkomponenten 1 Workshop Methoden- und Werkzeugentwicklung für den mikrosystementwurf (Karlsruhe) 1994
4. Benecke W 1991 Mikromechanik ed A Heuberger (Berlin: Springer)
5. Karam J M, Courtois B and Bauge M 1996 High level CAD melds microsystems with foundries Proc. ED&TC 96 (Paris) 1996
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7. CMP 1996 MiCroSystem ES2 Cadence 4.3.3 DesignKit User Guide version 2.0 Grenoble, France, January 1996
8. Hofmann K, Karam J M, Schulze M, Theisen M, Courtois B and Glesner M 1995 Automatische ubersetzung von FEM-Modellen in eine analoge hardware-beschreibungssprache Proc. Mikrosystemtechnik '95 (Chemnitz) 1995