Integrated digital silicon micro-accelerometer with MOSFET-type sensing elements

Journal of Micromechanics and Microengineering

Volumn 10, Issue 3, 2000, Pages 350-358

  Yee, Youngjoo ^a   Bu, Jong Uk ^a   Chun, Kukjin ^b   Lee, Joong Won ^a  

^a LG Electronics Inc   (South Korea)

^b Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; CMOS INTEGRATED CIRCUITS; MICROMACHINING; MOSFET DEVICES; SILICON SENSORS;

SILICON MICROACCELERATORS;

MICROSENSORS;

EID: 0034275581     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/10/3/308     Document Type: Article

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