A novel spiral CMOS compatible micromachined thermoelectric IR microsensor

Journal of Micromechanics and Microengineering

Volumn 11, Issue 5, 2001, Pages 574-576

  Socher, E ^a   Bochobza Degani, O ^a   Nemirovsky, Y ^a  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; INFRARED IMAGING; INTEGRATION; MICROMACHINING; SIGNAL NOISE MEASUREMENT; THERMOELECTRICITY;

INFRARED MICROSENSORS; THERMAL SENSORS;

MICROSENSORS;

EID: 0035445836     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/11/5/320     Document Type: Article

References (13)

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6. Study of uncooled micromachined integrated thermoelectric IR sensors
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8. Optimal design and noise considerations of CMOS compatible IR thermoelectric sensors
9. Optimal performance of CMOS compatible IR thermoelectric sensors
10. Industrial fabrication technology for CMOS infrared sensor arrays
11. Metal-oxide semiconductor implementation service (MOSIS)-A multi-project fabrication service run by the Advanced Research Projects Agency (ARPA)
12. Absorbing layers for thermal detectors
13. Microbolometer uncooled infrared camera with 20 mK NETD