A CMOS-compatible fluid density sensor

Journal of Micromechanics and Microengineering

Volumn 7, Issue 3, 1997, Pages 253-255

  Westberg, David ^a   Paul, Oliver ^b   Andersson, Gert ^a   Baltes, Henry ^b  

^a CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

^b ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; CMOS INTEGRATED CIRCUITS; DENSITY MEASUREMENT (SPECIFIC GRAVITY); ETCHING; INTEGRATED CIRCUIT MANUFACTURE; MICROELECTROMECHANICAL DEVICES; MICROMACHINING;

FLUID DENSITY SENSORS;

SENSORS;

EID: 0031223073     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/7/3/047     Document Type: Article

References (7)

1. 3 präparatvolumen Z. Ang. Phys. 27 273-7
2. Stemme E, Ekelof J and Nordin L 1983 Measuring liquid density with a tuning-fork transducer IEEE Trans. Instrum. Meas. pp 434-7
3. Enoksson P, Stemme G and Stemme E 1995 Fluid density sensor based on resonance vibration Sens. Actuators A 47 327-31
4. Enoksson P, Stemme G and Stemme E 1995 Vibration mode investigation of a resonant silicon tube structure for use as a fluid density sensor Proc. IEEE Micro Electro Mechanical Systems pp 133-8
5. Enoksson P, Stemme G and Stemme E 1995 Silicon tube structures for a fluid density sensor Transducers '95, Digest of Technical Papers 1 540-3
6. Westberg D, Paul O and Baltes H 1996 Surface micromachining by sacrificial aluminium etching J. Micromech. Microeng. 6 376-84
7. Jaeggi D 1996 Thermal converters by CMOS technology PhD Thesis ETH Zürich No 11567