CMOS foundry-based micromachining

Journal of Micromechanics and Microengineering

Volumn 6, Issue 1, 1996, Pages 122-127

  Tilmans, Harrie A C ^a   Baert, Kris ^b   Verbist, Agnes ^b   Puers, Rober ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

^b IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMACHINING; SEMICONDUCTOR DEVICE MANUFACTURE;

MICROMECHANICAL STRUCTURES;

CMOS INTEGRATED CIRCUITS;

EID: 0030092039     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/6/1/030     Document Type: Article

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