CMOS integrated pressure sensor optimization using electrical network simulator-FEM tool coupling

Journal of Micromechanics and Microengineering

Volumn 9, Issue 2, 1999, Pages 109-112

  Gotz A ^a   Krassow, H ^a   Zabala, M ^a   Santander, J ^a   Cane C ^a  

^a INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; FINITE ELEMENT METHOD; INTEGRATED CIRCUIT MANUFACTURE; MICROSENSORS; OPTIMIZATION; VARIABLE FREQUENCY OSCILLATORS;

ELECTRICAL NETWORK SIMULATOR; MICROSYSTEM; PIEZORESISTORS; PRESSURE SENSOR;

MICROELECTRONICS;

EID: 0033138346     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/9/2/002     Document Type: Article

References (5)

1. Herbert D B 1992 Simulating differential equations with SPICE2 IEEE Circuits Devices 1 11-4
2. Eccardt P-C, Knoth M, Ebest G, Landes H, Claus C and Wünsche S 1996 Coupled finite element and network simulation for microsystem components Micro System Technologies '96 (Potsdam) ed H Reichl and A Heuberger pp 145-50
3. Cané C, Campabadal F, Esteve J, Lozano M, Götz A, Santander J, Burrer Ch, Plaza J A, Pahun L and Marco S 1995 A technology for the monolithic fabrication of a pressure sensor and related circuitry Sensors Actuators A 46/47 133-6
4. Bao M H, Yu L Z and Wang Y 1990 Micromachined beam-diaphragm structure improves performances of pressure transducer Sensors Actuators A 21-23 137-41
5. Krassow H, Zabala M, Götz A and Cané C 1998 MEMS design optimization using coupled FEM and electrical circuit simulation Proc. MSM98, 1st Int. Conf. on Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators (Santa Clara, CA, 1998) (Boston: computational Publications) pp 329-33