Optical properties of AlN thin films correlated with sputtering conditions

Thin Solid Films

Volumn 333, Issue 1-2, 1998, Pages 251-255

  Gadenne, M ^a   Plon, J ^a   Gadenne, P ^b  

^a CNRS   (France)

^b Centre National de la Recherche Scientifique   (France)

Author keywords

Aluminium nitride; Ellipsometry; Optical spectroscopy; Opticl properties

Indexed keywords

ELLIPSOMETRY; NITRIDES; SEMICONDUCTING ALUMINUM COMPOUNDS; SPECTROPHOTOMETRY; ULTRAVIOLET SPECTROSCOPY;

NITRIDE SEMICONDUCTORS;

THIN FILMS;

EID: 0032204264     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)00816-5     Document Type: Article

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