Growth of GaN layers onto misoriented (0001) sapphire by metalorganic chemical vapor deposition

Journal of Applied Physics

Volumn 86, Issue 11, 1999, Pages 6059-6067

  Pecz B ^a   Di Forte Poisson, M A ^b   Huet, F ^b   Radnoczi G ^a   Toth L ^a   Papaioannou, V ^c   Stoemenos, J ^c  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^b THALES   (France)

^c ARISTOTLE UNIVERSITY OF THESSALONIKI   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0041571589     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.371654     Document Type: Article

References (35)

1. S. Nakamura, T. Mukai, and M. Senoh, Appl. Phys. Lett. 64, 1687 (1994).
2. S. Nakamura, M. Senoh, S. Nagahama, N. Isawa, T. Yamada, T. Matsushita, H. Kiyoku, and Y. Sugimoto, Jpn. J. Appl. Phys., Part 2 35, L74 (1996).
3. R. J. Molnar, R. Singh, and T. D. Moustakas, Appl. Phys. Lett. 66, 268 (1995).
4. H. Amano, N, Sawaki, I. Akasaki, and Y. Toyoda, Appl. Phys. Lett. 48, 353 (1986).
5. S. Nakamura, Jpn. J. Appl. Phys., Part 2 30, L1705 (1991).
6. A. Yamamoto, M. Tsujino, M. Ohkubo, and A. Hashimoto, J. Cryst. Growth 137, 415 (1994).
7. H. Kawakami, K. Sakurai, K. Tsubougchi, and N. Mikoshiba, Jpn. J. Appl. Phys., Part 2 27, L161 (1988).
8. K. Uchida, A. Watanabe, F. Yano, M. Kouguchi, T. Tanaka, and S. Minagawa, J. Appl. Phys. 79, 3487 (1996).
9. K. Uchida, A. Watanabe, F. Yano, M. Kouguchi, T. Tanaka, and S. Minagawa, Solid-State Electron. 41, 135 (1997).
10. N. Grandjean, J. Masseies, P. Vennègues, M. Laügt, and M. Leroux, Mater. Res. Soc. Symp. Proc. 449, 67 (1997).
11. N. Grandjean, J. Masseies, P. Vennègues, M. Laügt, and M. Leroux, Appl. Phys. Lett. 70, 643 (1997).
12. C.-Y. Hwang, M. J. Schurman, W. E. Mayo, Y. Li, Y. Lu, H. Liu, T. Salagaj, and R. A. Stall, J. Vac. Sci. Technol. A 13, 672 (1995).
13. X. H. Wu, D. Kapolnek, E. J. Tarsa, B. Heying, S. Keller, U. K. Mishra, S. P. DenBaars, and J. S. Speck, Appl. Phys. Lett. 68, 1371 (1996).
14. J. N. Kuznia, M. A. Khan, D. T. Olson, R. Kaplan, and J. Freitas, J. Appl. Phys. 73, 4700 (1993).
15. L. Sugiura, K. Itaya, J. Nishino, H. Fujimoto, and Y. Kokubun, J. Appl. Phys. 82, 4877 (1997).
16. K. Hiramatsu, H. Amano, I. Akasaki, H. Kato, N. Koide, and K. Manabe, J. Cryst. Growth 107, 509 (1991).
17. P. A. Grudowski, A. L. Holmes, C. J. Eiting, and R. D. Dupuis, Appl. Phys. Lett. 69, 3626 (1996).
18. Á. Barna, Mater. Res. Soc. Symp. Proc. 254, 3 (1992).
19. JCPD card: 25-1495.
20. A. Madan, I. W. Kim, S. C. Cheng, P. Yashar, V. P. Dravid, and S. A. Barnett, Phys. Rev. Lett. 78, 1743 (1997).
21. Á. Barna, G. Radnóczi and B. Pécz, in Handbook of Microscopy, edited by S. Amelinckx, D. van Dyck, J. van Landuyt, and G. van Tendelo (VCH, 1997), Vol. 3, Chap. II/3, pp. 751-801.
22. A. Barna, B. Pécz, and M. Menyhard, Ultramicroscopy 70, 161 (1998).
23. P. B. Hirsh, A. Howie, R. B. Nicholson, D. W. Pashley, and M. J. Whelan, Electron Microscopy of Thin Crystals (Butterworth, London, 1965).
24. L. Montelius, J. O. Tegenfeldt, and P. van Heeren, J. Vac. Sci. Technol. B 12, 2222 (1994).
25. X. J. Ning, F. R. Chien, P. Pirouz, J. W. Yang, and M. A. Khan, J. Mater. Res. 11, 580 (1996).
26. L. T. Romano and J. E. Northrup, Mater. Res. Soc. Symp. Proc. 449, 423 (1997).
27. F. A. Ponce, D. Cherns, W. T. Young, J. W. Steeds, and S. Nakamura, Mater. Res. Soc. Symp. Proc. 449, 405 (1997).
28. W. Qian, M. Skowronski, and G. S. Rohrer, Mater. Res. Soc. Symp. Proc. 423, 475 (1996).
29. J-L. Rouviére, M. Arlery, A. Bourret, R. Niebuhr, and K. Bachern, Inst. Phys. Conf. Ser. 146, 285 (1995).
30. J-L. Rouviére, M. Arlery, A. Bourret, R. Niebuhr, and K. Bachem, Mater. Res. Soc. Symp. Proc. 395, 393 (1996).
31. J. L. Lábá, B. Pécz, G. Radnóczi, and M. A. di Forte-Poisson, Proc. of ICEM 14, Cancun, Mexico, III, 1998, p. 453.
32. B. Pécz, M. A. di Forte-Poisson, L. Tóth, G. Radnóczi, G. Huhn, V. Papaioannou, and J. Stoemenos, Mater. Sci. Eng., B 50, 93 (1997).
33. J-L. Rouviére, M. Arlery, and A. Bourret, Inst. Phys. Conf. Ser. 157, 173 (1997).
34. Z. Liliental-Weber, Y. Chen, S. Rumirov, W. Swider, and J. Washburn, Mater. Res. Soc. Symp. Proc. 449, 417 (1997).
35. W. Quian, G. S. Rohrer, M. Skowronski, K. Doverspike, L. B. Rowland, and D. K. Gaskill, Appl. Phys. Lett. 67, 2284 (1995).