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Fresenius' Journal of Analytical Chemistry

Volumn 365, Issue 1-3, 1999, Pages 244-248

XANES and XPS characterization of hard amorphous CSixNy thin films grown by RF nitrogen plasma assisted Pulsed Laser Deposition

(8) Tharigen T a Mayer, D a Hesse, R a Streubel, P a Lorenz, D b Grau, P b Lorenz, M a Szargan, R a

a UNIVERSITY OF LEIPZIG (Germany)

b MARTIN LUTHER UNIVERSITY HALLE WITTENBERG (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0040113184 PISSN: 09370633 EISSN: None Source Type: Journal
DOI: 10.1007/s002160051481 Document Type: Article

Times cited : (15)

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