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Journal of Micromechanics and Microengineering

Volumn 11, Issue 2, 2001, Pages 133-139

Patterning, electroplating and removal of SU-8 moulds by excimer laser micromachining

(4) Ghantasala, Muralidhar K a Hayes, Jason P a Harvey, Erol C a Sood, Dinesh K b

a SWINBURNE UNIVERSITY OF TECHNOLOGY (Australia)

b RMIT UNIVERSITY (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ELECTROPLATING; ETCHING; EXCIMER LASERS; LASER ABLATION; LITHOGRAPHY; MICROMACHINING; MOLDS; OPTICAL MICROSCOPY; PROFILOMETRY; SCANNING ELECTRON MICROSCOPY; THERMAL EFFECTS;

CARBONACEOUS FILMS; EXCIMER ABLATION LITHOGRAPHY;

PHOTORESISTS;

EID: 0035278580 PISSN: 09601317 EISSN: None Source Type: Journal
DOI: 10.1088/0960-1317/11/2/308 Document Type: Article

Times cited : (80)

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