Fabrication of polymer high aspect ratio structures with hot embossing for microfluidic applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3877, Issue , 1999, Pages 74-79

  Becker, H ^a   Heim, U ^a   Roetting, O ^a  

^a Jenoptik Mikrotechnik GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; MICROELECTROMECHANICAL DEVICES; POLYMERS;

HOT EMBOSSING; MICROFABRICATION; MICROFLUIDIC SYSTEMS;

FLUIDIC DEVICES;

EID: 0033316582     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)