Nonlinear effects in inductively coupled plasmas

Physics of Plasmas

Volumn 10, Issue 5 II, 2003, Pages 2108-2116

  Smolyakov, A I ^a   Godyak, V A ^b   Tyshetskiy, Y O ^a  

^a UNIVERSITY OF SASKATCHEWAN   (Canada)

^b OSRAM SYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRIC CURRENTS; ENERGY DISSIPATION; MAGNETIC FIELDS; MAGNETOHYDRODYNAMICS; MONTE CARLO METHODS; PLASMA COLLISION PROCESSES; PLASMA HEATING; PLASMA SIMULATION; POLARIZATION; SKIN EFFECT; WAVE PLASMA INTERACTIONS;

PONDEROMOTIVE FORCES;

INDUCTIVELY COUPLED PLASMA;

EID: 0038633600     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1566443     Document Type: Conference Paper

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