Observation of interface defects in thermally oxidized SiC using positron annihilation

Applied Physics Letters

Volumn 82, Issue 13, 2003, Pages 2020-2022

  Dekker, James ^a   Saarinen, Kimmo ^a   Ólafsson, Halldór ^b   Sveinbjörnsson, Einar Ö ^b  

^a AALTO UNIVERSITY   (Finland)

^b CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CARRIER CONCENTRATION; CRYSTAL DEFECTS; INTERFACES (MATERIALS); POSITRON ANNIHILATION SPECTROSCOPY; THERMOOXIDATION;

VACANCY DEFECTS;

SILICON CARBIDE;

EID: 0037475083     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1564637     Document Type: Article

References (17)

1. V. V. Afanas'ev and A. Stesmans, Appl. Phys. Lett. 77, 2024 (2000).
2. H. Ö. Ólafsson, E. Ö. Sveinbjörnsson, T. E. Rudenko, I. P. Tyagulski, I. N. Osiyuk, and V. S. Lysenko, Appl. Phys. Lett. 79, 4034 (2001).
3. M. Di Ventra and S. T. Pantelides, Phys. Rev. Lett. 83, 1624 (1999).
4. P. J. Macfarlane and M. E. Zvanut, J. Appl. Phys. 88, 4122 (2000).
5. P. J. Macfarlane, M. E. Zvanut, and G. M. Jankowski, J. Appl. Phys. 89, 955 (2001).
6. K. Fukuda, S. Suzuki, T. Tanaka, and K. Arai, Appl. Phys. Lett. 76, 1585 (2000).
7. V. V. Afanas'ev, A. Stesmans, M. Bassler, G. Pensl, and M. J. Schulz, Appl. Phys. Lett. 76, 336 (2000).
8. H. Kauppinen, C. Corbel, J. Nissilä, K. Saarinen, and P. Hautojärvi, Phys. Rev. B 57, 12911 (1998).
9. M. Clement, J. M. M. de Nijs, P. Balk, H. Schut, and A. van Veen, J. Appl. Phys. 81, 1943 (1997).
10. J. Dekker, R. Aavikko, and K. Saarinen, Appl. Surf. Sci. 194, 97 (2002).
11. H. Kauppinen, C. Corbel, L. Liszkay, T. Laine, J. Oila, K. Saarinen, P. Hautojärvi, M. F. Barthe, and G. Blondiaux, J. Phys.: Condens. Matter 9, 10595 (1997).
12. S. T. Pantelides, R. Buczko, M. Di Ventra, S. Wang, S.-G. Kim, S. J. Pennycook, G. Duscher, L. C. Feldman, K. McDonald, R. K. Chanana, R. A. Weller, J. R. Williams, G. Y. Chung, C. C. Tin, T. Isaacs-Smith, Mater. Res. Soc. Symp. Proc. 640, H.3.3.1 (2001).
13. R. Buczko, S. Pennycook, and S. T. Pantelides, Phys. Rev. Lett. 84, 943 (2000).
14. P. Asoka-Kumar, K. G. Lynn, and D. O. Welch, J. Appl. Phys. 76, 4935 (1994).
15. A. Gali, D. Heringer, P. Deák, Z. Hajnal, Th. Frauenheim, R. P. Devaty, and W. J. Choyke, Phys. Rev. B 66, 125208 (2002).
16. V. V. Afanas'ev, A. Stesmans, M. Bassler, G. Pensl, and M. J. Schulz, Appl. Phys. Lett. 78, 4043 (2001).
17. B. K. Panda, G. Brauer, W. Skorupa, and J. Kuriplach, Phys. Rev. B 61, 15848 (2000).