Simulation of surface and line-edge roughness formation in resists

Microelectronic Engineering

Volumn 57-58, Issue , 2001, Pages 563-569

  Patsis, G P ^a   Gogolides, E ^a  

^a INSTITUTE OF MICROELECTRONICS   (Greece)

Author keywords

Line edge roughness; Resists; SR; Surface roughness

Indexed keywords

COMPUTER SIMULATION; PHOTORESISTS; SPIN COATING; SURFACE ROUGHNESS;

LINE-EDGE ROUGHNESS;

MICROELECTRONICS;

EID: 0035450649     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(01)00547-0     Document Type: Conference Paper

References (8)