Applications of molecular modeling in nanolithography

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 6, 1999, Pages 3371-3378

  Pawloski, A R ^a   Torres, J A ^a   Nealey, P F ^a   De Pablo, J J ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033265555     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591013     Document Type: Article

References (19)

1. M. K. Templeton, C. R. Szmanda, and A. Zampini, Proc. SPIE 771, 136 (1987).
2. R. R. Dammel, Diazonaphthoquinone-based Resists, Tutorial Text No. 11 (SPIE, Bellingham, WA, 1993).
3. M. Hanabata, Y. Uetani, and A. Furuta, J. Vac. Sci. Technol. B 7, 640 (1989).
4. M. J. Hanrahan and K. S. Hollis, Proc. SPIE 771, 128 (1987).
5. T. Aoai, T. Yamanaka, and M. Yagihara, J. Photopolym. Sci. Technol. 10, 387 (1997).
6. H. Sun, Macromolecules 28, 701 (1995).
7. R. D. Allen, K. J. Chen, and P. M. Gallagher-Wetmore, Proc. SPIE 2438, 250 (1995).
8. E. Sauer, G. Schopf, K. Polz, and J. Bendig, J. prakt. Chem. 335, 185 (1993).
9. G. Casiraghi, M. Cornia, G. Sartori, G. Casnati, V. Bocchi, and G. Andreetti, Makromol. Chem. 183, 2611 (1982).
10. Polymer Handbook, edited by Brandrup and Immergut (Interscience, New York, 1966).
11. J. L. Keddie, R. A. L. Jones, and R. A. Cory, Faraday Discuss. 98, 219 (1994).
12. J. A. Forrest, K. Dalkoni-Veress, and J. R. Dutcher, Phys. Rev. E 56, 5705 (1997).
13. S. W. Smith and C. K. Hall, J. Comput. Phys. 134, 16 (1997).
14. D. Fryer, P. F. Nealey, and J. J. de Pablo (unpublished).
15. T. Shibata, T. Ishii, H. Nozawa, and T. Tamamura, Jpn. J. Appl. Phys., Part 1 36, 7542 (1997).
16. T. Tanaka, M. Morigami, H. Oizumi, T. Ogawa, and S. Uchino, Jpn. J. Appl. Phys., Part 2 33, L1803 (1994).
17. T. Tanaka, M. Morigami, H. Oizumi, and T. Ogawa, Jpn. J. Appl. Phys., Part 1 32, 5813 (1993).
18. T. Tanaka, M. Morigami, H. Oizumi, T. Soga, T. Ogawa, and F. Murai, J. Electrochem. Soc. 141, L169 (1994).
19. Mechanics of Materials (Wiley, New York, 1996).