Moving boundary transport model for acid diffusion in chemically amplified resists

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 6, 1999, Pages 3339-3344

  Croffie, Ebo ^a   Cheng, Mosong ^a   Neureuther, Andrew ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033260778     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591008     Document Type: Article

References (13)

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