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Volumn 17, Issue 6, 1999, Pages 3367-3370
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Simulation of roughness in chemically amplified resists using percolation theory
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0033260111
PISSN: 10711023
EISSN: None
Source Type: Journal
DOI: 10.1116/1.591012 Document Type: Article |
Times cited : (18)
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References (12)
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