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Thin Solid Films

Volumn 406, Issue 1-2, 2002, Pages 46-53

Synthesis and thermal decomposition of carbon nitride films prepared by nitrogen ion implantation into graphite

(2) Deng, Z W a Souda, R a

a NATIONAL INSTITUTE FOR MATERIALS SCIENCE (Japan)

Author keywords

Carbon nitride; Ion implantation; Thermal decomposition; Thermal desorption

Indexed keywords

CARBON NITRIDE; DESORPTION; FILM PREPARATION; ION BEAMS; ION IMPLANTATION; IONIZATION; NITROGEN; PYROLYSIS; SECONDARY ION MASS SPECTROMETRY; SYNTHESIS (CHEMICAL); THERMAL EFFECTS; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON NITRIDE FILMS;

THIN FILMS;

EID: 0037051217 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(01)01785-0 Document Type: Article

Times cited : (22)

References (32)

1
- 20444373328
- (1989) Science , vol.245 , pp. 841
- Liu, A.¹ Cohen, M.²

2
- 0042059097
- (1990) Phys. Rev. B , vol.41 , pp. 10727
- Liu, A.¹ Cohen, M.²

3
- 0032692055
- (1999) Diamond Relat. Mater. , vol.8 , pp. 1809
- Muhl, S.¹ Méndez, J.M.²

4
- 0031295275
- (1997) Prog. Mater. Sci. , vol.41 , pp. 241
- Wang, E.G.¹

5
- 12044253618
- (1994) Phys. Rev. Lett. , vol.73 , pp. 118
- Marton, D.¹ Boyd, K.J.² Al-Bayati, A.H.³ Todorov, S.S.⁴ Rabalais, J.W.⁵

6
- 0000859548
- (1985) J. Appl. Phys. , vol.58 , pp. 2539
- Hasegawa, S.¹ Zalm, P.S.²

7
- 0001091899
- (1992) J. Chem. Phys. , vol.97 , pp. 2742
- Park, K.H.¹ Kim, B.C.² Kang, H.³

8
- 36449007236
- (1994) Appl. Phys. Lett. , vol.64 , pp. 845
- Hoffman, A.¹ Gouzman, I.² Brener, R.³

9
- 0031224307
- (1997) Vacuum , vol.48 , pp. 709
- Palacio, C.¹ Gomez-Aleixandre, C.² Diaz, D.³ Garcia, M.M.⁴

10
- 0000613326
- (1996) J. Appl. Phys. , vol.79 , pp. 2364
- Xin, H.¹ Lin, C.² Xu, W.³ Wang, L.⁴ Zou, S.⁵ Wu, X.⁶ Shi, X.⁷ Zhu, H.⁸

11
- 0031069301
- (1997) Jpn. J. Appl. Phys. , vol.36
- Yamamoto, K.¹ Koga, Y.² Yase, K.³ Fujiwara, S.⁴ Kubota, M.⁵

12
- 0033410858
- (1999) J. Vac. Sci. Technol. A , vol.17 , pp. 411
- Gouzman, I.¹ Brener, R.² Hoffman, A.³

13
- 0035478366
- (2001) Nucl. Instrum. Methods B , vol.183 , pp. 260
- Deng, Z.W.¹ Souda, R.²

14
- 0343353819
- (2000) J. Phys. B , vol.33 , pp. 3615
- Torres, I.¹ Martínez, R.² Sánchez Rayo, M.N.³ Castaño, F.⁴

15
- 0000425478
- (1998) Phys. Rev. B , vol.58 , pp. 2207
- Ronnig, C.¹ Feldermann, H.² Merk, R.³ Hofsass, H.⁴ Reinke, P.⁵ Thiele, J.-U.⁶

16
- 0345201742
- and references therein
- (1999) Thin Solid Films , vol.347 , pp. 72
- D'Anna, E.¹ De Giorgi, M.L.² Luches, A.³ Martino, M.⁴ Perrone, A.⁵ Zocco, A.⁶

17
- 0344124690
- (1970) Phys. Scripta , vol.2 , pp. 70
- Gelius, U.¹ Heden, P.F.² Hedman, J.³ Limberg, B.J.⁴ Manne, R.⁵ Nordber, R.⁶ Nording, R.⁷ Siegbahn, K.⁸

18
- 37049138096
- (1973) J. Chem. Soc. Faraday Trans. , vol.69 , pp. 551
- Barber, M.¹ Connor, J.A.² Guest, M.F.³ Hillier, I.H.⁴ Schwartz, M.⁵ Stacey, M.⁶

19
- 0001185236
- (1984) J. Am. Chem. Soc. , vol.106 , pp. 4374
- Boutique, J.P.¹ Verbist, J.J.² Fripiat, J.G.³ Delhalle, J.⁴ Pfister-Guillouzo, G.⁵ Ashwell, G.J.⁶

20
- 0001244912
- (1997) Phys. Rev. Lett. , vol.78 , pp. 3326
- Weich, F.¹ Widany, J.² Frauenheim, T.³

21
- 0030219231
- (1996) Thin Solid Films , vol.281-282 , pp. 289
- Kobayashi, S.¹ Nozaki, S.² Morisaki, H.³ Fukui, S.⁴ Masaki, S.⁵

22
- 0030415484
- (1996) Thin Solid Films , vol.290-291 , pp. 107
- Hammer, P.¹ Baker, M.A.² Lenardi, C.³ Gissler, W.⁴

23
- 0031543052
- (1997) J. Vac. Sci. Technol. A , vol.15 , pp. 107
- Hammer, P.¹ Baker, M.A.² Lenardi, C.³ Gissler, W.⁴

24
- 0027595021
- (1993) Surf. Sci. , vol.287-288 , pp. 758
- Nilson, A.¹ Bjorneholm, O.² Tillborg, H.³ Hernnas, B.⁴ Guest, R.J.⁵ Sandell, A.⁶ Palmer, R.E.⁷ Martensson, N.⁸

25
- 0342842051
- (1990) J. Chem. Phys. , vol.92 , pp. 2187
- Snauwaert, P.¹ Lazzaroni, R.² Riga, J.³ Verbist, J.J.⁴ Gonbeau, D.⁵

26
- 0003885146
- Wiley, Chichester
- (1990) Practical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy, second ed
- Briggs, D.¹ Seah, M.P.²

27
- 0033534955
- (1999) Thin Solid Films , vol.339 , pp. 38
- Yamamoto, K.¹ Koga, Y.² Fujiwara, S.³ Kokai, F.⁴ Kleiman, J.I.⁵ Kim, K.K.⁶

28
- 33947094490
- (1978) J. Am. Chem. Soc. , vol.100 , pp. 4441
- Taylor, J.A.¹ Lancaster, G.M.² Rabalais, J.W.³

29
- 0033905258
- (2000) Diamond Relat. Mater. , vol.9 , pp. 212
- Fernández-Ramos, C.¹ Sayagués, M.J.² Rojas, T.C.³ Alcalá, M.D.⁴ Real, C.⁵ Fernández, A.⁶

30
- 0001615725
- (1998) Carbon , vol.36 , pp. 765
- Falk, F.¹ Meinschien, J.² Schuster, K.³ Stafast, H.⁴

31
- 0003998388
- D.R. Lide (Ed.), CRC Press LLC, New York
- (2000) CRC Handbook of Chemistry and Physics , pp. 10-178
- Lias, S.G.¹

32
- 0035839150
- (2001) Surf. Sci. , vol.488 , pp. 393
- Deng, Z.W.¹ Souda, R.²

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