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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 183, Issue 3-4, 2001, Pages 260-270

A SIMS study on positive and negative ions sputtered from graphite by mass-separated low energy Ne+, N2+ and N+ ions

(2) Deng, Z W a Souda, R a

a NATIONAL INSTITUTE FOR MATERIALS SCIENCE (Japan)

Author keywords

Carbon nitride; Graphite; Ion bombardment; Ion emission; SIMS

Indexed keywords

ADSORPTION; DESORPTION; ETCHING; GRAPHITE; HIGH TEMPERATURE EFFECTS; KINETIC ENERGY; NEGATIVE IONS; POSITIVE IONS; SECONDARY ION MASS SPECTROMETRY; SPUTTER DEPOSITION;

LOW ENERGY ION BEAMS;

ION BOMBARDMENT;

EID: 0035478366 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(01)00742-X Document Type: Article

Times cited : (13)

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