Application of electroless nickel-boron films for high-selectivity pattern transfer processes

Chemistry of Materials

Volumn 14, Issue 11, 2002, Pages 4586-4594

  Ma, David I ^a   Shirey, Loretta ^a   McCarthy, Daniel ^a   Thompson, Alan ^a,d   Qadri, Syed B ^b   Dressick, Walter J ^c   Chen, Mu San ^c   Calvert, Jeffrey M ^c,e   Kapur, Ravi ^c,f   Brandow, Susan L ^c  

^a Nanoelectron Proc Fac (Code 6804)   (United States)

^b Electronics Sci and Technol Div   (United States)

^c NAVAL RESEARCH LABORATORY   (United States)

^d UNITED STATES NAVAL ACADEMY   (United States)

^e SHIPLEY COMPANY   (United States)

^f Anudeza Group   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BORON; METAL; NICKEL; PALLADIUM; SILICON DERIVATIVE;

ARTICLE; CATALYSIS; CATALYST; ELECTRONICS; FILM; MATERIALS; MORPHOLOGY; PRINTING; REFLECTOMETRY; STRUCTURE ANALYSIS; THICKNESS;

EID: 0036854687     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm0202308     Document Type: Article

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