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Volumn 15, Issue 5, 1997, Pages 1818-1824

Nanolithography by displacement of catalytic metal clusters using an atomic force microscope tip

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; GOLD; MASKS; NUCLEAR MAGNETIC RESONANCE SPECTROSCOPY; PALLADIUM; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; ULTRAVIOLET SPECTROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0031224159     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589531     Document Type: Article
Times cited : (28)

References (49)
  • 35
    • 5344243858 scopus 로고
    • edited by A. Ulman Academic, Boston
    • J. M. Calvert, Thin Films, edited by A. Ulman (Academic, Boston, 1995), Vol. 20.
    • (1995) Thin Films , vol.20
    • Calvert, J.M.1
  • 45
    • 5344222122 scopus 로고    scopus 로고
    • unpublished
    • C. S. Dulcey et al. (unpublished).
    • Dulcey, C.S.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.