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Volumn 50, Issue 8, 2002, Pages 1942-1949
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High-Q factor three-dimensional inductors
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Author keywords
GaAs; High Q factor; Inductors; Silicon; Three dimensional MMIC technology
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Indexed keywords
ELECTRIC NETWORK TOPOLOGY;
MONOLITHIC MICROWAVE INTEGRATED CIRCUITS;
NATURAL FREQUENCIES;
Q FACTOR MEASUREMENT;
SEMICONDUCTING GALLIUM ARSENIDE;
SEMICONDUCTING SILICON;
SUBSTRATES;
THREE DIMENSIONAL;
HIGH-Q FACTOR THREE DIMENSIONAL INDUCTORS;
SELF-RESONANT FREQUENCY;
THREE DIMENSIONAL MMIC TECHNOLOGY;
ELECTRIC INDUCTORS;
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EID: 0036686741
PISSN: 00189480
EISSN: None
Source Type: Journal
DOI: 10.1109/TMTT.2002.801342 Document Type: Article |
Times cited : (28)
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References (22)
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